Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/GuoZYCZLZX23
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/sensors/GuoZYCZLZX23
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Bin_Yao
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chenyang_Xue
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jianwei_Liu
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jin_Chai
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Shiqiang_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yuzhen_Guo
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Zengxing_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Zhou_Zhao
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.3390%2Fs23136061
>
foaf:
homepage
<
https://doi.org/10.3390/s23136061
>
dc:
identifier
DBLP journals/sensors/GuoZYCZLZX23
(xsd:string)
dc:
identifier
DOI doi.org%2F10.3390%2Fs23136061
(xsd:string)
dcterms:
issued
2023
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/sensors
>
rdfs:
label
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Bin_Yao
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chenyang_Xue
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jianwei_Liu
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jin_Chai
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Shiqiang_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yuzhen_Guo
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Zengxing_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Zhou_Zhao
>
swrc:
month
July
(xsd:string)
swrc:
number
13
(xsd:string)
swrc:
pages
6061
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/sensors/GuoZYCZLZX23/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/sensors/GuoZYCZLZX23
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#GuoZYCZLZX23
>
rdfs:
seeAlso
<
https://doi.org/10.3390/s23136061
>
dc:
title
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
23
(xsd:string)