Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/HanKKCH23
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Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/sensors/HanKKCH23
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chansu_Han
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jaehwan_Kim
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Kwangwook_Choi
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Sangjeen_Hong
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Yoonsung_Koo
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.3390%2Fs23052410
>
foaf:
homepage
<
https://doi.org/10.3390/s23052410
>
dc:
identifier
DBLP journals/sensors/HanKKCH23
(xsd:string)
dc:
identifier
DOI doi.org%2F10.3390%2Fs23052410
(xsd:string)
dcterms:
issued
2023
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/sensors
>
rdfs:
label
Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chansu_Han
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jaehwan_Kim
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Kwangwook_Choi
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Sangjeen_Hong
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Yoonsung_Koo
>
swrc:
month
March
(xsd:string)
swrc:
number
5
(xsd:string)
swrc:
pages
2410
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/sensors/HanKKCH23/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/sensors/HanKKCH23
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#HanKKCH23
>
rdfs:
seeAlso
<
https://doi.org/10.3390/s23052410
>
dc:
title
Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
23
(xsd:string)