Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/KreyHTKT20
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/sensors/KreyHTKT20
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Bernd_H%E2%88%9A%C2%A7hnlein
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Hannes_T%E2%88%9A%E2%88%82pfer
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Katja_Tonisch
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Maximilian_Krey
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Stefan_Krischok
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.3390%2Fs20041001
>
foaf:
homepage
<
https://doi.org/10.3390/s20041001
>
dc:
identifier
DBLP journals/sensors/KreyHTKT20
(xsd:string)
dc:
identifier
DOI doi.org%2F10.3390%2Fs20041001
(xsd:string)
dcterms:
issued
2020
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/sensors
>
rdfs:
label
Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Bernd_H%E2%88%9A%C2%A7hnlein
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Hannes_T%E2%88%9A%E2%88%82pfer
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Katja_Tonisch
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Maximilian_Krey
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Stefan_Krischok
>
swrc:
number
4
(xsd:string)
swrc:
pages
1001
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/sensors/KreyHTKT20/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/sensors/KreyHTKT20
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/sensors/sensors20.html#KreyHTKT20
>
rdfs:
seeAlso
<
https://doi.org/10.3390/s20041001
>
dc:
title
Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
20
(xsd:string)