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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/LeeIKLM19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jaewoo_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jeong-Hun_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jong-Pil_Im>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seung-Eon_Moon>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sol-Yee_Lim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs19030488>
foaf:homepage <https://doi.org/10.3390/s19030488>
dc:identifier DBLP journals/sensors/LeeIKLM19 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs19030488 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jaewoo_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jeong-Hun_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jong-Pil_Im>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seung-Eon_Moon>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sol-Yee_Lim>
swrc:number 3 (xsd:string)
swrc:pages 488 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/LeeIKLM19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/LeeIKLM19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#LeeIKLM19>
rdfs:seeAlso <https://doi.org/10.3390/s19030488>
dc:title Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 19 (xsd:string)