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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/LiuHWZXSTYGXRR19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Denis_Remiens>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hao_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jia_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinghui_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junyan_Ren>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Leming_He>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Malika_Toubal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nikolay_Smagin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weijiang_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wenjuan_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xubo_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuandong_Gu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs19204450>
foaf:homepage <https://doi.org/10.3390/s19204450>
dc:identifier DBLP journals/sensors/LiuHWZXSTYGXRR19 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs19204450 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Denis_Remiens>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hao_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jia_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jinghui_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junyan_Ren>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Leming_He>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Malika_Toubal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nikolay_Smagin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weijiang_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wenjuan_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xubo_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuandong_Gu>
swrc:number 20 (xsd:string)
swrc:pages 4450 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/LiuHWZXSTYGXRR19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/LiuHWZXSTYGXRR19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors19.html#LiuHWZXSTYGXRR19>
rdfs:seeAlso <https://doi.org/10.3390/s19204450>
dc:title 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 19 (xsd:string)