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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/LvH0W023>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chunpu_Lv>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huangang_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jingwei_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ming_Zhang_0015>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_Zhang_0006>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs23094392>
foaf:homepage <https://doi.org/10.3390/s23094392>
dc:identifier DBLP journals/sensors/LvH0W023 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs23094392 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chunpu_Lv>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huangang_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jingwei_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ming_Zhang_0015>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_Zhang_0006>
swrc:number 9 (xsd:string)
swrc:pages 4392 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/LvH0W023/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/LvH0W023>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors23.html#LvH0W023>
rdfs:seeAlso <https://doi.org/10.3390/s23094392>
dc:title Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 23 (xsd:string)