Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/Mata-HernandezF20
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/sensors/Mata-HernandezF20
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Daniel_Fern%E2%88%9A%C2%B0ndez
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Diana_Mata-Hernandez
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jordi_Madrenas
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Saoni_Banerji
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.3390%2Fs20216037
>
foaf:
homepage
<
https://doi.org/10.3390/s20216037
>
dc:
identifier
DBLP journals/sensors/Mata-HernandezF20
(xsd:string)
dc:
identifier
DOI doi.org%2F10.3390%2Fs20216037
(xsd:string)
dcterms:
issued
2020
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/sensors
>
rdfs:
label
Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Daniel_Fern%E2%88%9A%C2%B0ndez
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Diana_Mata-Hernandez
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jordi_Madrenas
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Saoni_Banerji
>
swrc:
number
21
(xsd:string)
swrc:
pages
6037
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/sensors/Mata-HernandezF20/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/sensors/Mata-HernandezF20
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/sensors/sensors20.html#Mata-HernandezF20
>
rdfs:
seeAlso
<
https://doi.org/10.3390/s20216037
>
dc:
title
Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
20
(xsd:string)