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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/sensors/MatsumaeKKTHHT22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eiji_Higurashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideki_Takagi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Le_Hac_Huong_Thu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masanori_Hayase>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shingo_Kariya>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takashi_Matsumae>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuichi_Kurashima>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fs22218144>
foaf:homepage <https://doi.org/10.3390/s22218144>
dc:identifier DBLP journals/sensors/MatsumaeKKTHHT22 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fs22218144 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/sensors>
rdfs:label Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eiji_Higurashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideki_Takagi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Le_Hac_Huong_Thu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masanori_Hayase>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shingo_Kariya>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takashi_Matsumae>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuichi_Kurashima>
swrc:number 21 (xsd:string)
swrc:pages 8144 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/sensors/MatsumaeKKTHHT22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/sensors/MatsumaeKKTHHT22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/sensors/sensors22.html#MatsumaeKKTHHT22>
rdfs:seeAlso <https://doi.org/10.3390/s22218144>
dc:title Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 22 (xsd:string)