Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/NaitoNU19
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Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches.
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Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches.
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