Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/sensors/NazemiBSANALE20
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Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT.
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Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT.
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