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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/symmetry/TerekhovTUBKINSGMPLT23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anatoly_N._Lukin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dmitry_Goloshchapov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dmitry_Minakov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dmitry_N._Nesterov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Elena_V._Popova>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Evgeniy_I._Terukov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Irina_N._Trapeznikova>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Konstantin_A._Barkov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nikolay_A._Kurilo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pavel_Seredin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sergey_A._Ivkov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Vladimir_A._Terekhov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yurii_K._Undalov>
foaf:homepage <http://dx.doi.org/doi.org%2F10.3390%2Fsym15091800>
foaf:homepage <https://doi.org/10.3390/sym15091800>
dc:identifier DBLP journals/symmetry/TerekhovTUBKINSGMPLT23 (xsd:string)
dc:identifier DOI doi.org%2F10.3390%2Fsym15091800 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/symmetry>
rdfs:label Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anatoly_N._Lukin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dmitry_Goloshchapov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dmitry_Minakov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dmitry_N._Nesterov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Elena_V._Popova>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Evgeniy_I._Terukov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Irina_N._Trapeznikova>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Konstantin_A._Barkov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nikolay_A._Kurilo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pavel_Seredin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sergey_A._Ivkov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Vladimir_A._Terekhov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yurii_K._Undalov>
swrc:month September (xsd:string)
swrc:number 9 (xsd:string)
swrc:pages 1800 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/symmetry/TerekhovTUBKINSGMPLT23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/symmetry/TerekhovTUBKINSGMPLT23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/symmetry/symmetry15.html#TerekhovTUBKINSGMPLT23>
rdfs:seeAlso <https://doi.org/10.3390/sym15091800>
dc:title Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 15 (xsd:string)