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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tase/Al-RawashdehJH23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marcel_Fran%E2%88%9A%C3%9Fois_Heertjes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mohammad_Al_Janaideh>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yazan_Mohammad_Al-Rawashdeh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTASE.2022.3196318>
foaf:homepage <https://doi.org/10.1109/TASE.2022.3196318>
dc:identifier DBLP journals/tase/Al-RawashdehJH23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTASE.2022.3196318 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tase>
rdfs:label Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marcel_Fran%E2%88%9A%C3%9Fois_Heertjes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mohammad_Al_Janaideh>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yazan_Mohammad_Al-Rawashdeh>
swrc:number 1 (xsd:string)
swrc:pages 718-732 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tase/Al-RawashdehJH23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tase/Al-RawashdehJH23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tase/tase20.html#Al-RawashdehJH23>
rdfs:seeAlso <https://doi.org/10.1109/TASE.2022.3196318>
dc:title Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 20 (xsd:string)