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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tase/LiuBRKB17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/%E2%88%9A%C4%96mer_Faruk_Beyca>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jia_Peter_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Prahalad_K._Rao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Satish_T._S._Bukkapatnam>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhenyu_James_Kong>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTASE.2016.2599436>
foaf:homepage <https://doi.org/10.1109/TASE.2016.2599436>
dc:identifier DBLP journals/tase/LiuBRKB17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTASE.2016.2599436 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tase>
rdfs:label Dirichlet Process Gaussian Mixture Models for Real-Time Monitoring and Their Application to Chemical Mechanical Planarization. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/%E2%88%9A%C4%96mer_Faruk_Beyca>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jia_Peter_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Prahalad_K._Rao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Satish_T._S._Bukkapatnam>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhenyu_James_Kong>
swrc:number 1 (xsd:string)
swrc:pages 208-221 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tase/LiuBRKB17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tase/LiuBRKB17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tase/tase14.html#LiuBRKB17>
rdfs:seeAlso <https://doi.org/10.1109/TASE.2016.2599436>
dc:title Dirichlet Process Gaussian Mixture Models for Real-Time Monitoring and Their Application to Chemical Mechanical Planarization. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 14 (xsd:string)