Numerical modeling of a micromachined thermal conductivity gas pressure sensor.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/tcad/AllegrettoSHLR94
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1994
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Numerical modeling of a micromachined thermal conductivity gas pressure sensor.
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1247-1256
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Numerical modeling of a micromachined thermal conductivity gas pressure sensor.
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