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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/BadrTG17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andres_Torres>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Puneet_Gupta_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasmine_Badr>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTCAD.2016.2614262>
foaf:homepage <https://doi.org/10.1109/TCAD.2016.2614262>
dc:identifier DBLP journals/tcad/BadrTG17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTCAD.2016.2614262 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label Mask Assignment and DSA Grouping for DSA-MP Hybrid Lithography for Sub-7 nm Contact/Via Holes. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andres_Torres>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Puneet_Gupta_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasmine_Badr>
swrc:number 6 (xsd:string)
swrc:pages 913-926 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/BadrTG17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/BadrTG17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad36.html#BadrTG17>
rdfs:seeAlso <https://doi.org/10.1109/TCAD.2016.2614262>
dc:title Mask Assignment and DSA Grouping for DSA-MP Hybrid Lithography for Sub-7 nm Contact/Via Holes. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 36 (xsd:string)