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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/BohmayrBLRS98>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alexander_Burenkov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Heiner_Ryssel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Lorenz>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siegfried_Selberherr>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Walter_Bohmayr>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F43.736563>
foaf:homepage <https://doi.org/10.1109/43.736563>
dc:identifier DBLP journals/tcad/BohmayrBLRS98 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F43.736563 (xsd:string)
dcterms:issued 1998 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label Monte Carlo simulation of silicon amorphization during ion implantation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alexander_Burenkov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Heiner_Ryssel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Lorenz>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siegfried_Selberherr>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Walter_Bohmayr>
swrc:number 12 (xsd:string)
swrc:pages 1236-1243 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/BohmayrBLRS98/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/BohmayrBLRS98>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad17.html#BohmayrBLRS98>
rdfs:seeAlso <https://doi.org/10.1109/43.736563>
dc:title Monte Carlo simulation of silicon amorphization during ion implantation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 17 (xsd:string)