[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/HarafujiMNKY93>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akio_Misaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hirohiko_Yamashita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kenji_Harafuji>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Kawamoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Noboru_Nomura>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F43.256925>
foaf:homepage <https://doi.org/10.1109/43.256925>
dc:identifier DBLP journals/tcad/HarafujiMNKY93 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F43.256925 (xsd:string)
dcterms:issued 1993 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label A novel hierarchical approach for proximity effect correction in electron beam lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akio_Misaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hirohiko_Yamashita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kenji_Harafuji>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Kawamoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Noboru_Nomura>
swrc:number 10 (xsd:string)
swrc:pages 1508-1514 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/HarafujiMNKY93/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/HarafujiMNKY93>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad12.html#HarafujiMNKY93>
rdfs:seeAlso <https://doi.org/10.1109/43.256925>
dc:title A novel hierarchical approach for proximity effect correction in electron beam lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 12 (xsd:string)