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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/HeitzingerHS03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andreas_H%E2%88%9A%E2%88%82ssinger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Clemens_Heitzinger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siegfried_Selberherr>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTCAD.2003.814259>
foaf:homepage <https://doi.org/10.1109/TCAD.2003.814259>
dc:identifier DBLP journals/tcad/HeitzingerHS03 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTCAD.2003.814259 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label On smoothing three-dimensional Monte Carlo ion implantation simulation results. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andreas_H%E2%88%9A%E2%88%82ssinger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Clemens_Heitzinger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siegfried_Selberherr>
swrc:number 7 (xsd:string)
swrc:pages 879-883 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/HeitzingerHS03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/HeitzingerHS03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad22.html#HeitzingerHS03>
rdfs:seeAlso <https://doi.org/10.1109/TCAD.2003.814259>
dc:title On smoothing three-dimensional Monte Carlo ion implantation simulation results. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 22 (xsd:string)