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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/HiraiTISEHN91>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kazushi_Ikeda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masaru_Sasago>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masayuki_Endo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Noboru_Nomura>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sadafumi_Tomida>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sigeru_Hayama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshihiko_Hirai>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F43.137508>
foaf:homepage <https://doi.org/10.1109/43.137508>
dc:identifier DBLP journals/tcad/HiraiTISEHN91 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F43.137508 (xsd:string)
dcterms:issued 1991 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kazushi_Ikeda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masaru_Sasago>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masayuki_Endo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Noboru_Nomura>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sadafumi_Tomida>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sigeru_Hayama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshihiko_Hirai>
swrc:number 6 (xsd:string)
swrc:pages 802-807 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/HiraiTISEHN91/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/HiraiTISEHN91>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad10.html#HiraiTISEHN91>
rdfs:seeAlso <https://doi.org/10.1109/43.137508>
dc:title Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 10 (xsd:string)