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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tcad/MatsuzawaMHS87>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akemi_Moniwa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideo_Sunami>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/N._Hasegawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Teruo_Matsuzawa>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTCAD.1987.1270291>
foaf:homepage <https://doi.org/10.1109/TCAD.1987.1270291>
dc:identifier DBLP journals/tcad/MatsuzawaMHS87 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTCAD.1987.1270291 (xsd:string)
dcterms:issued 1987 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tcad>
rdfs:label Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akemi_Moniwa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideo_Sunami>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/N._Hasegawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Teruo_Matsuzawa>
swrc:number 3 (xsd:string)
swrc:pages 446-451 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tcad/MatsuzawaMHS87/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tcad/MatsuzawaMHS87>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tcad/tcad6.html#MatsuzawaMHS87>
rdfs:seeAlso <https://doi.org/10.1109/TCAD.1987.1270291>
dc:title Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 6 (xsd:string)