Ballistic deposition simulation of via metallization using a quasi-three-dimensional model.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/tcad/SmyTB91
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/tcad/SmyTB91
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Michael_J._Brett
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/R._Niall_Tait
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Tom_J._Smy
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2F43.62798
>
foaf:
homepage
<
https://doi.org/10.1109/43.62798
>
dc:
identifier
DBLP journals/tcad/SmyTB91
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2F43.62798
(xsd:string)
dcterms:
issued
1991
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/tcad
>
rdfs:
label
Ballistic deposition simulation of via metallization using a quasi-three-dimensional model.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Michael_J._Brett
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/R._Niall_Tait
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Tom_J._Smy
>
swrc:
number
1
(xsd:string)
swrc:
pages
130-135
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/tcad/SmyTB91/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/tcad/SmyTB91
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/tcad/tcad10.html#SmyTB91
>
rdfs:
seeAlso
<
https://doi.org/10.1109/43.62798
>
dc:
title
Ballistic deposition simulation of via metallization using a quasi-three-dimensional model.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
10
(xsd:string)