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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tec/RobinOMHB03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrea_Orzati>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Esteban_Moreno_Soriano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Franck_Robin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Otte_Jakob_Homan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Werner_B%E2%88%9A%C2%A7chtold>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTEVC.2002.806166>
foaf:homepage <https://doi.org/10.1109/TEVC.2002.806166>
dc:identifier DBLP journals/tec/RobinOMHB03 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTEVC.2002.806166 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tec>
rdfs:label Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrea_Orzati>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Esteban_Moreno_Soriano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Franck_Robin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Otte_Jakob_Homan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Werner_B%E2%88%9A%C2%A7chtold>
swrc:number 1 (xsd:string)
swrc:pages 69-82 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tec/RobinOMHB03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tec/RobinOMHB03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tec/tec7.html#RobinOMHB03>
rdfs:seeAlso <https://doi.org/10.1109/TEVC.2002.806166>
dc:title Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 7 (xsd:string)