Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/tec/RobinOMHB03
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/tec/RobinOMHB03
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Andrea_Orzati
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Esteban_Moreno_Soriano
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Franck_Robin
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Otte_Jakob_Homan
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Werner_B%E2%88%9A%C2%A7chtold
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FTEVC.2002.806166
>
foaf:
homepage
<
https://doi.org/10.1109/TEVC.2002.806166
>
dc:
identifier
DBLP journals/tec/RobinOMHB03
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FTEVC.2002.806166
(xsd:string)
dcterms:
issued
2003
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/tec
>
rdfs:
label
Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Andrea_Orzati
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Esteban_Moreno_Soriano
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Franck_Robin
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Otte_Jakob_Homan
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Werner_B%E2%88%9A%C2%A7chtold
>
swrc:
number
1
(xsd:string)
swrc:
pages
69-82
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/tec/RobinOMHB03/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/tec/RobinOMHB03
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/tec/tec7.html#RobinOMHB03
>
rdfs:
seeAlso
<
https://doi.org/10.1109/TEVC.2002.806166
>
dc:
title
Simulation and evolutionary optimization of electron-beam lithography with genetic and simplex-downhill algorithms.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
7
(xsd:string)