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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tie/GaoLHZLJS23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Cunlang_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dong_Sun_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Libo_Zhao_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qijing_Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wendi_Gao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiangguang_Han>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhuangde_Jiang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIE.2022.3203756>
foaf:homepage <https://doi.org/10.1109/TIE.2022.3203756>
dc:identifier DBLP journals/tie/GaoLHZLJS23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIE.2022.3203756 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tie>
rdfs:label A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Cunlang_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dong_Sun_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Libo_Zhao_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qijing_Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wendi_Gao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiangguang_Han>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhuangde_Jiang>
swrc:month July (xsd:string)
swrc:number 7 (xsd:string)
swrc:pages 7467-7477 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tie/GaoLHZLJS23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tie/GaoLHZLJS23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tie/tie70.html#GaoLHZLJS23>
rdfs:seeAlso <https://doi.org/10.1109/TIE.2022.3203756>
dc:title A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 70 (xsd:string)