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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tie/WuXZWYLZLG20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Danlei_Yan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guoqiang_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jayce_Lay_Keng_Lim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinghui_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nan_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiaolin_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yao_Zhu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuandong_Gu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIE.2019.2959966>
foaf:homepage <https://doi.org/10.1109/TIE.2019.2959966>
dc:identifier DBLP journals/tie/WuXZWYLZLG20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIE.2019.2959966 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tie>
rdfs:label Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications". (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Danlei_Yan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guoqiang_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jayce_Lay_Keng_Lim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jinghui_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nan_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiaolin_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yao_Zhu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuandong_Gu>
swrc:number 11 (xsd:string)
swrc:pages 9976 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tie/WuXZWYLZLG20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tie/WuXZWYLZLG20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tie/tie67.html#WuXZWYLZLG20>
rdfs:seeAlso <https://doi.org/10.1109/TIE.2019.2959966>
dc:title Correction to "Wafer-Level Vacuum-Packaged High-Performance AlN-on-SOI Piezoelectric Resonator for Sub-100-MHz Oscillator Applications". (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 67 (xsd:string)