Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/tie/YuZHJXYZSQJ23
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Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams.
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Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams.
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