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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tim/FujitaFZAMK22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kazuaki_Fujita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kenichi_Fujii>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lulu_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naoki_Kuramoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shigeki_Mizushima>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Azuma>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIM.2021.3129229>
foaf:homepage <https://doi.org/10.1109/TIM.2021.3129229>
dc:identifier DBLP journals/tim/FujitaFZAMK22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIM.2021.3129229 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tim>
rdfs:label Investigating Stability of Si Sphere Surface Layer in Ambient-Vacuum Cyclic Measurements Using Ellipsometry. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kazuaki_Fujita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kenichi_Fujii>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lulu_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naoki_Kuramoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shigeki_Mizushima>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Azuma>
swrc:pages 1-9 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tim/FujitaFZAMK22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tim/FujitaFZAMK22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tim/tim71.html#FujitaFZAMK22>
rdfs:seeAlso <https://doi.org/10.1109/TIM.2021.3129229>
dc:title Investigating Stability of Si Sphere Surface Layer in Ambient-Vacuum Cyclic Measurements Using Ellipsometry. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 71 (xsd:string)