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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tim/QuWYBL23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qiwen_Bao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wensong_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xueli_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhengchun_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zilian_Qu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIM.2023.3323998>
foaf:homepage <https://doi.org/10.1109/TIM.2023.3323998>
dc:identifier DBLP journals/tim/QuWYBL23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIM.2023.3323998 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tim>
rdfs:label High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qiwen_Bao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wensong_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xueli_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhengchun_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zilian_Qu>
swrc:pages 1-8 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tim/QuWYBL23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tim/QuWYBL23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tim/tim72.html#QuWYBL23>
rdfs:seeAlso <https://doi.org/10.1109/TIM.2023.3323998>
dc:title High-Precision Resistivity Measurement of Silicon Wafer Under Unstable Lift-Off Distance Using Inductive and Laser Sensors-Integrated Probe. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 72 (xsd:string)