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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tim/WangWTL22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chengxin_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fangxin_Tian>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tongqing_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xinchun_Lu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIM.2022.3204104>
foaf:homepage <https://doi.org/10.1109/TIM.2022.3204104>
dc:identifier DBLP journals/tim/WangWTL22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIM.2022.3204104 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tim>
rdfs:label Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chengxin_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fangxin_Tian>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tongqing_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xinchun_Lu>
swrc:pages 1-10 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tim/WangWTL22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tim/WangWTL22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tim/tim71.html#WangWTL22>
rdfs:seeAlso <https://doi.org/10.1109/TIM.2022.3204104>
dc:title Thickness Measurement Based on Eddy Current Sensor With Coaxial Double Coil for Chemical Mechanical Polishing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 71 (xsd:string)