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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tim/WasedaFZKF17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Waseda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Fujimoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kenichi_Fujii>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naoki_Kuramoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiao-Wei_Zhang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIM.2016.2624838>
foaf:homepage <https://doi.org/10.1109/TIM.2016.2624838>
dc:identifier DBLP journals/tim/WasedaFZKF17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIM.2016.2624838 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tim>
rdfs:label Uniformity Evaluation of Lattice Spacing of 28Si Single Crystals. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Waseda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Fujimoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kenichi_Fujii>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naoki_Kuramoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiao-Wei_Zhang>
swrc:number 6 (xsd:string)
swrc:pages 1304-1308 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tim/WasedaFZKF17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tim/WasedaFZKF17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tim/tim66.html#WasedaFZKF17>
rdfs:seeAlso <https://doi.org/10.1109/TIM.2016.2624838>
dc:title Uniformity Evaluation of Lattice Spacing of 28Si Single Crystals. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 66 (xsd:string)