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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tim/XuLSLYCZHC24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fang_Cheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Liansheng_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pan_Yao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peng_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qiang-Xian_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rong-Wei_Lin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rui-Jun_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yi_Shen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhenying_Cheng>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTIM.2023.3343805>
foaf:homepage <https://doi.org/10.1109/TIM.2023.3343805>
dc:identifier DBLP journals/tim/XuLSLYCZHC24 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTIM.2023.3343805 (xsd:string)
dcterms:issued 2024 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tim>
rdfs:label Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 őľm. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fang_Cheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Liansheng_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pan_Yao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peng_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qiang-Xian_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rong-Wei_Lin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rui-Jun_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yi_Shen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhenying_Cheng>
swrc:pages 1-10 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tim/XuLSLYCZHC24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tim/XuLSLYCZHC24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tim/tim73.html#XuLSLYCZHC24>
rdfs:seeAlso <https://doi.org/10.1109/TIM.2023.3343805>
dc:title Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 őľm. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 73 (xsd:string)