An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/todaes/YangLZPZYZ17
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An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation.
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An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation.
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