Process Mining Applied to the Test Process of Wafer Scanners in ASML.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/tsmc/RozinatJGA09
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Process Mining Applied to the Test Process of Wafer Scanners in ASML.
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Process Mining Applied to the Test Process of Wafer Scanners in ASML.
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