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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tvlsi/MirsaeediTA14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andres_J._Torres>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Minoo_Mirsaeedi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mohab_H._Anis>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTVLSI.2013.2265309>
foaf:homepage <https://doi.org/10.1109/TVLSI.2013.2265309>
dc:identifier DBLP journals/tvlsi/MirsaeediTA14 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTVLSI.2013.2265309 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tvlsi>
rdfs:label Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andres_J._Torres>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Minoo_Mirsaeedi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mohab_H._Anis>
swrc:number 5 (xsd:string)
swrc:pages 1170-1174 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tvlsi/MirsaeediTA14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tvlsi/MirsaeediTA14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tvlsi/tvlsi22.html#MirsaeediTA14>
rdfs:seeAlso <https://doi.org/10.1109/TVLSI.2013.2265309>
dc:title Litho-Friendly Decomposition Method for Self-Aligned Triple Patterning. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 22 (xsd:string)