Property | Value |
---|---|
dcterms:bibliographicCitation | <http://dblp.uni-trier.de/rec/bibtex/phd/ndltd/Hsing19> |
dc:creator | <https://dblp.l3s.de/d2r/resource/authors/Mitchell_Hsing> |
dc:identifier | DBLP phd/ndltd/Hsing19 (xsd:string) |
dcterms:issued | 2019 (xsd:gYear) |
rdfs:label | Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication. (xsd:string) |
foaf:maker | <https://dblp.l3s.de/d2r/resource/authors/Mitchell_Hsing> |
dc:publisher | Massachusetts Institute of Technology, Cambridge, USA (xsd:string) |
owl:sameAs | <http://bibsonomy.org/uri/bibtexkey/phd/ndltd/Hsing19/dblp> |
owl:sameAs | <http://dblp.rkbexplorer.com/id/phd/ndltd/Hsing19> |
dc:title | Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication. (xsd:string) |
dc:type | <http://purl.org/dc/dcmitype/Text> |
rdf:type | swrc:PhDThesis |
rdf:type | foaf:Document |