Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP).
Resource URI: https://dblp.l3s.de/d2r/resource/publications/phd/ndltd/Johnson15
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dcterms:
bibliographicCitation
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2015
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Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP).
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Massachusetts Institute of Technology, Cambridge, MA, USA
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Slurry abrasive particle agglomeration experimentation and modeling for chemical mechanical planarization (CMP).
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