[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/phd/ndltd/Yen91>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anthony_Yen>
foaf:homepage <https://hdl.handle.net/1721.1/13078>
dc:identifier DBLP phd/ndltd/Yen91 (xsd:string)
dcterms:issued 1991 (xsd:gYear)
rdfs:label Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anthony_Yen>
dc:publisher Massachusetts Institute of Technology, Cambridge, MA, USA (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/phd/ndltd/Yen91/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/phd/ndltd/Yen91>
rdfs:seeAlso <https://hdl.handle.net/1721.1/13078>
dc:title Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:PhDThesis
rdf:type foaf:Document