Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/series/sci/WiakS11
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Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures.
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Integrated Computer Models of 3-D Comb Drive Electrostatic MEMS Structures.
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