Search results for "micromachining"

Hits ?▲	Authors	Title	Venue	Year	Link	Author keywords
95	Ming Xia, Yiliu Tu	An Investigation of Femtosecond Laser Micromachining.	ICMENS	2005	DBLP DOI BibTeX RDF
65	Jae-Geun Oh, Bumkyoo Choi, Seung-Yop Lee	A Monolithically Packaged Cordless Sensor System Embedding MEMS A/D Converter and Saw Transponder.	ICMENS	2004	DBLP DOI BibTeX RDF	SAW radio transponder, Touch mode, Micromachining technology, Wireless sensor, Capacitive sensor
41	Guangyi Shi, Qiang Huang 0002, Wen J. Li, Wenqian Huang, Gengchen Shi, Kejie Li	Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process.	ICRA	2004	DBLP DOI BibTeX RDF
41	Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine	Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology.	MSE	1999	DBLP DOI BibTeX RDF
36	Gary K. Fedder	MEMS Fabrication.	ITC	2003	DBLP DOI BibTeX RDF
36	Benoît Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois	Generation of Electrically Induced Stimuli for MEMS Self-Test.	J. Electron. Test.	2001	DBLP DOI BibTeX RDF	MEMS test case-studies, MEMS failure mechanisms, BIST, self-test
29	Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet	Electro-thermal Stimuli for MEMS Testing in FSBM Technology.	J. Electron. Test.	2006	DBLP DOI BibTeX RDF	bulk micromachining, electro-thermal stimuli, testing, defects, MEMS
29	Ian G. Foulds, M. Parameswaran	Hysteresis Spring Single Digital Input Bistable Mechanism.	ICMENS	2005	DBLP DOI BibTeX RDF	Bistable, Single Input, Surface Micromachining Technology, PolyMUMPS, MEMS
29	Khalil Najafi	Low-power micromachined microsystems (invited talk).	ISLPED	2000	DBLP DOI BibTeX RDF	micromachining, power sources, low-power, MEMS, energy harvesting, microsystems
23	Zhen Zhang, Zenan Yang, Chenchong Wang, Wei Xu	Accelerating ultrashort pulse laser micromachining process comprehensive optimization using a machine learning cycle design strategy integrated with a physical model.	J. Intell. Manuf.	2024	DBLP DOI BibTeX RDF
23	Anila Puthoor, Megha Agrawal, Varshini K. M., Koushik K. Rao	Enhancement of Glass micromachining using selective copper electroplating.	ICST	2023	DBLP DOI BibTeX RDF
23	Akshay Saxena, Partha Sarathi Mallick, Karali Patra	Fabrication and characterization of wearable sensing system using mechanical micromachining process.	AIR	2023	DBLP DOI BibTeX RDF
23	Anjali V. Kulkarni	On the Simulation of Electrochemistry Aspect of Electrochemical Spark Micromachining Process.	SIMULTECH	2022	DBLP DOI BibTeX RDF
23	Vinay Shankar, Ryunosuke Matsuo, Minato Onishi, Daisuke Ishihara	2.5-dimensional insect-mimetic wing model for flapping wing nano air vehicles and design window search for manufacturable solutions using polymer micromachining.	NEMS	2022	DBLP DOI BibTeX RDF
23	Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya	First Step Toward Laser Micromachining Realization by Photonic Nanojet in Water Medium.	Int. J. Autom. Technol.	2021	DBLP DOI BibTeX RDF
23	Jianguo Lei, Bin Xu, Likuan Zhu	Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining.	IEEE Access	2020	DBLP DOI BibTeX RDF
23	Zeyad Yousif Abdoon Al-Shibaany, Pavel Penchev, John Hedley, Stefan S. Dimov	Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications.	Sensors	2020	DBLP DOI BibTeX RDF
23	Ziqiang Qu, Huafeng Liu 0002, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu	A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining.	IEEE SENSORS	2020	DBLP DOI BibTeX RDF
23	Sara Mingu, Ihor Pavlov, Çagdas Devrim Son, Alpan Bek	The Behaviour of Neuro-2A Cells on Silicon Substrates with Various Topographies Generated by Femtosecond Laser Micromachining.	BIOIMAGING	2020	DBLP DOI BibTeX RDF
23	Jian Qiao, Qinghua Lu 0002, Wenbao Zhang, Xiangyao Xue	The research about micromachining accuracy control based on fuzzy evaluation algorithm.	Concurr. Comput. Pract. Exp.	2019	DBLP DOI BibTeX RDF
23	Anurag Mahajan, Sagil James	Analytical modelling and experimental study of machining of smart materials using submerged abrasive waterjet micromachining process.	Int. J. Manuf. Res.	2019	DBLP DOI BibTeX RDF
23	Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, Luis Martín Flores-Nava, Griselda Stephany Abarca-Jimenez, Miguel Ángel Aleman-Arce, Yesenia Eleonor González-Navarro	Composition of Metal Layers in CMOS-MEMS Micromachining Process.	CCE	2019	DBLP DOI BibTeX RDF
23	Niharika Mirji, Swetlana Mishra, Debashis Maji	PDMS micromachining for flexible 3D microdevice realization using Kapton Tape as hard mask.	TENCON	2019	DBLP DOI BibTeX RDF
23	Yang Lu, Chien-Hsing Chen, Chao-Tsung Ma, Cheng-Ling Lee	A Hollow Core Fiber Fabry-Perot Interferometer Micromachining by Femtosecond Laser.	OECC/PSC	2019	DBLP DOI BibTeX RDF
23	S. P. Leo Kumar	Automation of tool path generation in multi-process micromachine tool for micromachining of prismatic and rotational parts.	Int. J. Comput. Integr. Manuf.	2018	DBLP DOI BibTeX RDF
23	Xichun Luo	Hybrid micromachining - a paradigm shift in micromanufacturing.	ICAC	2018	DBLP DOI BibTeX RDF
23	Wang Xin, Binzhen Zhang, Junlin Wang, Junping Duan	100 GHz waveguide band-pass filter employing UV-LIGA micromachining process.	Microelectron. J.	2017	DBLP DOI BibTeX RDF
23	N. Scott Barker, Matthew F. Bauwens, Arthur W. Lichtenberger, Robert M. Weikle	Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits.	Proc. IEEE	2017	DBLP DOI BibTeX RDF
23	Roberta Ramponi	Femtosecond laser micromachining: An enabling tool for quantum technologies.	ICTON	2017	DBLP DOI BibTeX RDF
23	Binh Xuan Cao, Munju Bae, Hyonkee Sohn, Jiyeon Choi, Youngduk Kim, Jeng-o Kim, Jiwhan Noh	Design and Performance of a Focus-Detection System for Use in Laser Micromachining.	Micromachines	2016	DBLP DOI BibTeX RDF
23	Nguyen Van Toan, Masaya Toda, Takahito Ono	An Investigation of Processes for Glass Micromachining.	Micromachines	2016	DBLP DOI BibTeX RDF
23	Won-Young Uhm, Tae-Jong Beak, Keun-Kwan Ryu, Sung-Chan Kim	Reduced Hybrid Ring Coupler Using Surface Micromachining Technology for 94-GHz MMIC Applications.	J. Inform. and Commun. Convergence Engineering	2016	DBLP DOI BibTeX RDF
23	Shaolin Xu, Shinsaku Osawa, Ryuichi Kobayashi, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa	Minimizing Burrs and Defects on Microstructures with Laser Assisted Micromachining Technology.	Int. J. Autom. Technol.	2016	DBLP DOI BibTeX RDF
23	Zhen Yu, Quanjie Gao, Ding-Fang Chen	Study on mathematical model of cutting force in micromachining.	Int. J. Model. Simul. Sci. Comput.	2015	DBLP DOI BibTeX RDF
23	Daniel Teixidor, Maciej Grzenda, Andrés Bustillo, Joaquim Ciurana	Modeling pulsed laser micromachining of micro geometries using machine-learning techniques.	J. Intell. Manuf.	2015	DBLP DOI BibTeX RDF
23	Lamia E. L. Fissi, Victor Xhurdebise, Laurent A. Francis	Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser.	Micromachines	2015	DBLP DOI BibTeX RDF
23	Ilya Alexeev, Johannes Heberle, Kristian Cvecek, Konstantin Yu. Nagulin, Michael Schmidt 0004	High Speed Pump-Probe Apparatus for Observation of Transitional Effects in Ultrafast Laser Micromachining Processes.	Micromachines	2015	DBLP DOI BibTeX RDF
23	Simas Butkus, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaizauskas, Andrius Melninkaitis, Dalia Kaskelyte, Martynas Barkauskas, Valdas Sirutkaitis	Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses.	Micromachines	2015	DBLP DOI BibTeX RDF
23	Fernando Castaño, Rodolfo E. Haber, Raúl M. del Toro, Gerardo Beruvides	Conductance sensor for micromachining. A case study on monitoring tool-workpiece contact.	ICIT	2015	DBLP DOI BibTeX RDF
23	Rajesh Kumar Porwal, Vinod Yadava	Modelling of performance characteristics during sinking electrical discharge micromachining of Ti-6Al-4V thin sheet.	Int. J. Manuf. Res.	2014	DBLP DOI BibTeX RDF
23	Florian Preusch, Benedikt Adelmann, Ralf Hellmann	Micromachining of AlN and Al2O3 Using Fiber Laser.	Micromachines	2014	DBLP DOI BibTeX RDF
23	K. M. Tanvir Ahmmed, Colin Grambow, Anne-Marie Kietzig	Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining.	Micromachines	2014	DBLP DOI BibTeX RDF
23	Rajesh Kumar Porwal, Vinod Yadava, J. Ramkumar	Neural Network Based Modelling and GRA Coupled PCA Optimization of Hole Sinking Electro Discharge Micromachining.	Int. J. Manuf. Mater. Mech. Eng.	2014	DBLP DOI BibTeX RDF
23	Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted R. Lundquist, Uwe Kerst, Christian Boit	Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm.	Microelectron. Reliab.	2014	DBLP DOI BibTeX RDF
23	Rajesh Kumar Porwal, Vinod Yadava	Experimentation and prediction of material removal rate of electrical discharge micromachining of nickel-based super alloy thin sheet.	Int. J. Comput. Aided Eng. Technol.	2014	DBLP DOI BibTeX RDF
23	Danqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang 0006, Dacheng Zhang	Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration.	NEMS	2014	DBLP DOI BibTeX RDF
23	Fernando Castaño, Rodolfo E. Haber, Raúl M. del Toro, Gerardo Beruvides	Application of hybrid incremental modeling for predicting surface roughness in micromachining processes.	CIES	2014	DBLP DOI BibTeX RDF
23	Zheng Liu, Hua Chen	Voxel Primitive Based Modeling and Simulating Method for Surface Micromachining Technology.	J. Softw.	2013	DBLP DOI BibTeX RDF
23	Yosuke Koga, Reiko Kuriyama, Yohei Sato, Koichi Hishida, Norihisa Miki	Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces.	Micromachines	2013	DBLP DOI BibTeX RDF
23	Ahmet Ozcan Nergiz, Ahmet Teoman Naskali, Zhenishbek Zhakypov, Edin Golubovic, Asif Sabanoviç	Implementation of a novel complex mechatronics software framework on laser micromachining workstation.	EUROCON	2013	DBLP DOI BibTeX RDF
23	Edin Golubovic, Islam S. M. Khalil, Ahmet Ozcan Nergiz, Eray A. Baran, Asif Sabanoviç	Design and control of laser micromachining workstation.	AMC	2012	DBLP DOI BibTeX RDF
23	Philipp Blumenthal, Annika Raatz	Adhesive Workpiece Fixturing for Micromachining.	IPAS	2012	DBLP DOI BibTeX RDF
23	Salvatore Surdo	Advanced Silicon Microstructuring by Electrochemical Micromachining: Technology and Applications.		2012	RDF
23	Ravindra Mukhiya, Alvise Bagolini, T. K. Bhattacharyya, Leandro Lorenzelli, M. Zen	Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.	Microelectron. J.	2011	DBLP DOI BibTeX RDF
23	Anjali V. Kulkarni, Vijay Kumar Jain, Krishna Avtar Misra	Electrochemical spark micromachining (microchannels and microholes) of metals and non-metals.	Int. J. Manuf. Technol. Manag.	2011	DBLP DOI BibTeX RDF
23	Anjali V. Kulkarni, Vijay Kumar Jain, Krishna Avtar Misra	Electrochemical Spark Micromachining: Present Scenario.	Int. J. Autom. Technol.	2011	DBLP DOI BibTeX RDF
23	Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca	Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors.	CCE	2011	DBLP DOI BibTeX RDF
23	Margherita Bassu	Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication.		2011	RDF
23	Jagannath Munda, M. Malapati, Bijoy Bhattacharyya	Investigation into the influence of Electrochemical Micromachining (EMM) parameters on Radial Overcut through RSM-based approach.	Int. J. Manuf. Technol. Manag.	2010	DBLP DOI BibTeX RDF
23	Alok Kumar Das, Partha Saha	Micromachining of silicon with excimer laser in air and water medium.	Int. J. Manuf. Technol. Manag.	2010	DBLP DOI BibTeX RDF
23	Ippei Kono, Naohiko Sugita, Mamoru Mitsuishi	Simulation of Laser Micromachining in Silica Glass with Absorbent Slurry.	Int. J. Autom. Technol.	2010	DBLP DOI BibTeX RDF
23	Min Deng, Wenjing Lu, Yan Wang, Faheng Zang, Guifu Ding	A novel triode-type carbon nanotube field emission micro-cathode fabricated by using electrochemical and micromachining.	NEMS	2010	DBLP DOI BibTeX RDF
23	Dugan Um, Bahram Asiabanpour, David Foor, Mathew Kurtz, Mary Tellers, Todd McGregor	Micro scale silicon dioxide gear fabrication by bulk micromachining process.	NEMS	2010	DBLP DOI BibTeX RDF
23	Bo Liu, Zhiqiu Lv, Zhihong Li, Xunjun He, Yilong Hao	A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch.	NEMS	2010	DBLP DOI BibTeX RDF
23	Richárd Berényi	Prototyping of a reliable 3D flexible IC cube package by laser micromachining.	Microelectron. Reliab.	2009	DBLP DOI BibTeX RDF
23	Mohammad Mayyas, Panos S. Shiakolas	Microsurface Reverse Engineering and Compensation for Laser Micromachining.	IEEE Trans Autom. Sci. Eng.	2009	DBLP DOI BibTeX RDF
23	Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun 0003, Yunxia Guo	Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration.	NEMS	2009	DBLP DOI BibTeX RDF
23	Chen-Kuei Chung, T. R. Shih, B. H. Wu	Characteristics of truncate-angle rhombic micromixer and rapid mold fabrication using CO2 laser micromachining.	NEMS	2009	DBLP DOI BibTeX RDF
23	Jerzy Kozak, D. Gulbinowicz, Z. Gulbinowicz	The Mathematical Modeling and Computer Simulation of Pulse Electrochemical Micromachining.	Eng. Lett.	2008	DBLP BibTeX RDF
23	Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat	Bulk micromachining for SOI based microsystems using double side XeF2 etching.	Int. J. Manuf. Technol. Manag.	2008	DBLP DOI BibTeX RDF
23	Mark J. Jackson, Grant M. Robinson, Mike P. Brady	Micromachining of bipolar plates used in proton exchange membrane fuel cells.	Int. J. Manuf. Technol. Manag.	2008	DBLP DOI BibTeX RDF
23	Xiang-meng Jing, Di Chen, Dong-Ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen	Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology.	Microelectron. J.	2007	DBLP DOI BibTeX RDF
23	Raquel Hellin-Rico, Jean Pierre Celis, Kris Baert, Chris Van Hoof, Ann Witvrouw	A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C	CoRR	2007	DBLP BibTeX RDF
23	Kanishka Biswas, Soumen K. Das, D. K. Maurya, S. Kal, S. K. Lahiri 0001	Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface.	Microelectron. J.	2006	DBLP DOI BibTeX RDF
23	Kanishka Biswas, S. Kal	Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon.	Microelectron. J.	2006	DBLP DOI BibTeX RDF
23	Hyung-Jung Kim, Won-Shik Chu, Sung-Hoon Ahn, Dong-Soo Kim, Cha-Soo Jun	Web-based design and manufacturing systems for micromachining: Comparison of architecture and usability.	Comput. Appl. Eng. Educ.	2006	DBLP DOI BibTeX RDF
23	S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi	Fabrication of 128×128 element optical switch array by micromachining technology.	Microprocess. Microsystems	2005	DBLP DOI BibTeX RDF
23	S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi	Fabrication of 128×128 element optical switch array by micromachining technology.	Microelectron. J.	2005	DBLP DOI BibTeX RDF
23	A. Pavolotsky, D. Meledin, C. Risacher, M. Pantaleev, V. Belitsky	Micromachining approach in fabricating of THz waveguide components.	Microelectron. J.	2005	DBLP DOI BibTeX RDF
23	Z. Moktadir, H. Wensink, Michael Kraft	Analytical model of micromachining of brittle materials with sharp particles.	Microelectron. J.	2005	DBLP DOI BibTeX RDF
23	Muthukuruman Packirisamy, Ion Stiharu, L. Flores	Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems.	Int. J. Manuf. Technol. Manag.	2005	DBLP DOI BibTeX RDF
23	Mohammad A. Mayyas, Panos S. Shiakolas	Application of Thin Plate Splines for Surface Reverse Engineering and Compensation for Femtosecond Laser Micromachining.	ISIC	2005	DBLP DOI BibTeX RDF
23	Francisco Tejada, Andreas G. Andreou, Dennis K. Wickenden, Arthur S. Francomacaro	Surface micromachining in Silicon on Sapphire CMOS technology.	ISCAS (4)	2004	DBLP BibTeX RDF
23	Alan Bonifas, Blaine Lilly	Design of an Electrochemical Cell for micromachining Applications.	Trans. SDPS	2003	DBLP BibTeX RDF
23	Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park 0001, Donghun Kwak, Taeyong Song, William Carr, James Bus	A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process.	Int. J. Comput. Eng. Sci.	2003	DBLP DOI BibTeX RDF
23	Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller	Advanced Silicon Micromachining.	Int. J. Comput. Eng. Sci.	2003	DBLP DOI BibTeX RDF
23	Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu	Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film.	Int. J. Comput. Eng. Sci.	2003	DBLP DOI BibTeX RDF
23	Robert Fedosejevs, Michael A. Argument, Arzu Sardarli, Sean E. Kirkwood, Robert Holenstein, Ying Y. Tsui	Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications.	ICMENS	2003	DBLP DOI BibTeX RDF
23	Seongho Cho	Laser micromachining of active and passive photonic integrated circuits.		2003	RDF
23	M. Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, Jean Marc Nicot, Coumar Oudéa	Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining.	Microelectron. Reliab.	2002	DBLP DOI BibTeX RDF
23	Leonard Dvorson	Micromachining and modeling of focused field emitters for flat panel displays.		2001	RDF
23	Brett Warneke, Kristofer S. J. Pister	An Integrated Circuit for the in Situ Characterization of CMOS Best-Process Micromachining.	SBCCI	2000	DBLP BibTeX RDF
23	Peter J. Hesketh	Micromachining.	The VLSI Handbook	1999	DBLP DOI BibTeX RDF
23	W. L. Jin, C. D. Mote	Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application].	IEEE Trans. Instrum. Meas.	1998	DBLP DOI BibTeX RDF
23	Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen	Bulk micromachining of silicon.	Proc. IEEE	1998	DBLP DOI BibTeX RDF
23	James M. Bustillo, Roger T. Howe, Richard S. Muller	Surface micromachining for microelectromechanical systems.	Proc. IEEE	1998	DBLP DOI BibTeX RDF
23	Henry Guckel	High-aspect-ratio micromachining via deep X-ray lithography.	Proc. IEEE	1998	DBLP DOI BibTeX RDF
23	Ming C. Wu	Micromachining for optical and optoelectronic systems.	Proc. IEEE	1997	DBLP DOI BibTeX RDF
23	A. Bruno Frazier	Recent applications of polyimide to micromachining technology.	IEEE Trans. Ind. Electron.	1995	DBLP DOI BibTeX RDF
23	Ren C. Luo, Zhenhai Chen	Modeling and implementation of an innovative micro proximity sensor using micromachining technology.	IROS	1993	DBLP DOI BibTeX RDF