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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/case/YangWSQ18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/FaJun_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naiqi_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rong_Su>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yan_Qiao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCOASE.2018.8560461>
foaf:homepage <https://doi.org/10.1109/COASE.2018.8560461>
dc:identifier DBLP conf/case/YangWSQ18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCOASE.2018.8560461 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
rdfs:label Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/FaJun_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naiqi_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rong_Su>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yan_Qiao>
swrc:pages 241-246 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/case/2018>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/case/YangWSQ18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/case/YangWSQ18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/case/case2018.html#YangWSQ18>
rdfs:seeAlso <https://doi.org/10.1109/COASE.2018.8560461>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/case>
dc:title Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document