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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/tsmc/QiaoWYZZ18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/FaJun_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/MengChu_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naiqi_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qinghua_Zhu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yan_Qiao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FTSMC.2016.2600583>
foaf:homepage <https://doi.org/10.1109/TSMC.2016.2600583>
dc:identifier DBLP journals/tsmc/QiaoWYZZ18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FTSMC.2016.2600583 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/tsmc>
rdfs:label Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/FaJun_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/MengChu_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naiqi_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qinghua_Zhu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yan_Qiao>
swrc:number 4 (xsd:string)
swrc:pages 622-636 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/tsmc/QiaoWYZZ18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/tsmc/QiaoWYZZ18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/tsmc/tsmc48.html#QiaoWYZZ18>
rdfs:seeAlso <https://doi.org/10.1109/TSMC.2016.2600583>
dc:title Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 48 (xsd:string)