Hits ?▲ |
Authors |
Title |
Venue |
Year |
Link |
Author keywords |
95 | Ming Xia, Yiliu Tu |
An Investigation of Femtosecond Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICMENS ![In: 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada, pp. 296-300, 2005, IEEE Computer Society, 0-7695-2398-6. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
|
65 | Jae-Geun Oh, Bumkyoo Choi, Seung-Yop Lee |
A Monolithically Packaged Cordless Sensor System Embedding MEMS A/D Converter and Saw Transponder. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICMENS ![In: 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada, pp. 473-479, 2004, IEEE Computer Society, 0-7695-2189-4. The full citation details ...](Pics/full.jpeg) |
2004 |
DBLP DOI BibTeX RDF |
SAW radio transponder, Touch mode, Micromachining technology, Wireless sensor, Capacitive sensor |
41 | Guangyi Shi, Qiang Huang 0002, Wen J. Li, Wenqian Huang, Gengchen Shi, Kejie Li |
Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICRA ![In: Proceedings of the 2004 IEEE International Conference on Robotics and Automation, ICRA 2004, April 26 - May 1, 2004, New Orleans, LA, USA, pp. 57-62, 2004, IEEE. The full citation details ...](Pics/full.jpeg) |
2004 |
DBLP DOI BibTeX RDF |
|
41 | Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine |
Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
MSE ![In: IEEE International Conference on Microelectronic Systems Education, MSE 1999, Arlington, Virginia, USA, July 19-21, 1999, pp. 28-29, 1999, IEEE Computer Society, 0-7695-0312-8. The full citation details ...](Pics/full.jpeg) |
1999 |
DBLP DOI BibTeX RDF |
|
36 | Gary K. Fedder |
MEMS Fabrication. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ITC ![In: Proceedings 2003 International Test Conference (ITC 2003), Breaking Test Interface Bottlenecks, 28 September - 3 October 2003, Charlotte, NC, USA, pp. 691-698, 2003, IEEE Computer Society, 0-7803-8106-8. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP DOI BibTeX RDF |
|
36 | Benoît Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois |
Generation of Electrically Induced Stimuli for MEMS Self-Test. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Electron. Test. ![In: J. Electron. Test. 17(6), pp. 459-470, 2001. The full citation details ...](Pics/full.jpeg) |
2001 |
DBLP DOI BibTeX RDF |
MEMS test case-studies, MEMS failure mechanisms, BIST, self-test |
29 | Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet |
Electro-thermal Stimuli for MEMS Testing in FSBM Technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Electron. Test. ![In: J. Electron. Test. 22(2), pp. 189-198, 2006. The full citation details ...](Pics/full.jpeg) |
2006 |
DBLP DOI BibTeX RDF |
bulk micromachining, electro-thermal stimuli, testing, defects, MEMS |
29 | Ian G. Foulds, M. Parameswaran |
Hysteresis Spring Single Digital Input Bistable Mechanism. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICMENS ![In: 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada, pp. 455-458, 2005, IEEE Computer Society, 0-7695-2398-6. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
Bistable, Single Input, Surface Micromachining Technology, PolyMUMPS, MEMS |
29 | Khalil Najafi |
Low-power micromachined microsystems (invited talk). ![Search on Bibsonomy](Pics/bibsonomy.png) |
ISLPED ![In: Proceedings of the 2000 International Symposium on Low Power Electronics and Design, 2000, Rapallo, Italy, July 25-27, 2000, pp. 1-8, 2000, ACM, 1-58113-190-9. The full citation details ...](Pics/full.jpeg) |
2000 |
DBLP DOI BibTeX RDF |
micromachining, power sources, low-power, MEMS, energy harvesting, microsystems |
23 | Zhen Zhang, Zenan Yang, Chenchong Wang, Wei Xu |
Accelerating ultrashort pulse laser micromachining process comprehensive optimization using a machine learning cycle design strategy integrated with a physical model. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Intell. Manuf. ![In: J. Intell. Manuf. 35(1), pp. 449-465, January 2024. The full citation details ...](Pics/full.jpeg) |
2024 |
DBLP DOI BibTeX RDF |
|
23 | Anila Puthoor, Megha Agrawal, Varshini K. M., Koushik K. Rao |
Enhancement of Glass micromachining using selective copper electroplating. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICST ![In: 16th International Conference on Sensing Technology, ICST 2023, Hyderabad, India, December 17-20, 2023, pp. 1-5, 2023, IEEE, 979-8-3503-9534-1. The full citation details ...](Pics/full.jpeg) |
2023 |
DBLP DOI BibTeX RDF |
|
23 | Akshay Saxena, Partha Sarathi Mallick, Karali Patra |
Fabrication and characterization of wearable sensing system using mechanical micromachining process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
AIR ![In: Proceedings of the 2023 6th International Conference on Advances in Robotics, AIR 2023, Ropar, India, July 5-8, 2023, pp. 17:1-17:5, 2023, ACM, 978-1-4503-9980-7. The full citation details ...](Pics/full.jpeg) |
2023 |
DBLP DOI BibTeX RDF |
|
23 | Anjali V. Kulkarni |
On the Simulation of Electrochemistry Aspect of Electrochemical Spark Micromachining Process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
SIMULTECH ![In: Proceedings of the 12th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2022, Lisbon, Portugal, July 14-16, 2022., pp. 172-177, 2022, SCITEPRESS, 978-989-758-578-4. The full citation details ...](Pics/full.jpeg) |
2022 |
DBLP DOI BibTeX RDF |
|
23 | Vinay Shankar, Ryunosuke Matsuo, Minato Onishi, Daisuke Ishihara |
2.5-dimensional insect-mimetic wing model for flapping wing nano air vehicles and design window search for manufacturable solutions using polymer micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2022, Taoyuan, Taiwan, April 14-17, 2022, pp. 306-311, 2022, IEEE, 978-1-6654-8301-8. The full citation details ...](Pics/full.jpeg) |
2022 |
DBLP DOI BibTeX RDF |
|
23 | Reza Aulia Rahman, Tsutomu Uenohara, Yasuhiro Mizutani, Yasuhiro Takaya |
First Step Toward Laser Micromachining Realization by Photonic Nanojet in Water Medium. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Autom. Technol. ![In: Int. J. Autom. Technol. 15(4), pp. 492-502, 2021. The full citation details ...](Pics/full.jpeg) |
2021 |
DBLP DOI BibTeX RDF |
|
23 | Jianguo Lei, Bin Xu, Likuan Zhu |
Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IEEE Access ![In: IEEE Access 8, pp. 97056-97063, 2020. The full citation details ...](Pics/full.jpeg) |
2020 |
DBLP DOI BibTeX RDF |
|
23 | Zeyad Yousif Abdoon Al-Shibaany, Pavel Penchev, John Hedley, Stefan S. Dimov |
Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Sensors ![In: Sensors 20(8), pp. 2206, 2020. The full citation details ...](Pics/full.jpeg) |
2020 |
DBLP DOI BibTeX RDF |
|
23 | Ziqiang Qu, Huafeng Liu 0002, Hao Ouyang, Chenyuan Hu, Liang Cheng Tu |
A High-sensitivity Optical MEMS Accelerometer based on SOI Double-side Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IEEE SENSORS ![In: 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020, pp. 1-4, 2020, IEEE, 978-1-7281-6801-2. The full citation details ...](Pics/full.jpeg) |
2020 |
DBLP DOI BibTeX RDF |
|
23 | Sara Mingu, Ihor Pavlov, Çagdas Devrim Son, Alpan Bek |
The Behaviour of Neuro-2A Cells on Silicon Substrates with Various Topographies Generated by Femtosecond Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
BIOIMAGING ![In: Proceedings of the 13th International Joint Conference on Biomedical Engineering Systems and Technologies (BIOSTEC 2020) - Volume 2: BIOIMAGING, Valletta, Malta, February 24-26, 2020., pp. 192-199, 2020, SCITEPRESS, 978-989-758-398-8. The full citation details ...](Pics/full.jpeg) |
2020 |
DBLP DOI BibTeX RDF |
|
23 | Jian Qiao, Qinghua Lu 0002, Wenbao Zhang, Xiangyao Xue |
The research about micromachining accuracy control based on fuzzy evaluation algorithm. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Concurr. Comput. Pract. Exp. ![In: Concurr. Comput. Pract. Exp. 31(10), 2019. The full citation details ...](Pics/full.jpeg) |
2019 |
DBLP DOI BibTeX RDF |
|
23 | Anurag Mahajan, Sagil James |
Analytical modelling and experimental study of machining of smart materials using submerged abrasive waterjet micromachining process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Res. ![In: Int. J. Manuf. Res. 14(3), pp. 278-294, 2019. The full citation details ...](Pics/full.jpeg) |
2019 |
DBLP DOI BibTeX RDF |
|
23 | Benito Granados-Rojas, Mario Alfredo Reyes-Barranca, Luis Martín Flores-Nava, Griselda Stephany Abarca-Jimenez, Miguel Ángel Aleman-Arce, Yesenia Eleonor González-Navarro |
Composition of Metal Layers in CMOS-MEMS Micromachining Process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
CCE ![In: 16th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2019, Mexico City, Mexico, September 11-13, 2019, pp. 1-4, 2019, IEEE, 978-1-7281-4840-3. The full citation details ...](Pics/full.jpeg) |
2019 |
DBLP DOI BibTeX RDF |
|
23 | Niharika Mirji, Swetlana Mishra, Debashis Maji |
PDMS micromachining for flexible 3D microdevice realization using Kapton Tape as hard mask. ![Search on Bibsonomy](Pics/bibsonomy.png) |
TENCON ![In: TENCON 2019 - 2019 IEEE Region 10 Conference (TENCON), Kochi, India, October 17-20, 2019, pp. 57-61, 2019, IEEE, 978-1-7281-1895-6. The full citation details ...](Pics/full.jpeg) |
2019 |
DBLP DOI BibTeX RDF |
|
23 | Yang Lu, Chien-Hsing Chen, Chao-Tsung Ma, Cheng-Ling Lee |
A Hollow Core Fiber Fabry-Perot Interferometer Micromachining by Femtosecond Laser. ![Search on Bibsonomy](Pics/bibsonomy.png) |
OECC/PSC ![In: 2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC), Fukuoka, Japan, July 7-11, 2019, pp. 1-3, 2019, IEEE, 978-4-88552-321-2. The full citation details ...](Pics/full.jpeg) |
2019 |
DBLP DOI BibTeX RDF |
|
23 | S. P. Leo Kumar |
Automation of tool path generation in multi-process micromachine tool for micromachining of prismatic and rotational parts. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Comput. Integr. Manuf. ![In: Int. J. Comput. Integr. Manuf. 31(1), pp. 49-70, 2018. The full citation details ...](Pics/full.jpeg) |
2018 |
DBLP DOI BibTeX RDF |
|
23 | Xichun Luo |
Hybrid micromachining - a paradigm shift in micromanufacturing. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICAC ![In: 24th International Conference on Automation and Computing, ICAC 2018, Newcastle upon Tyne, United Kingdom, September 6-7, 2018, pp. 1, 2018, IEEE, 978-1-86220-341-9. The full citation details ...](Pics/full.jpeg) |
2018 |
DBLP DOI BibTeX RDF |
|
23 | Wang Xin, Binzhen Zhang, Junlin Wang, Junping Duan |
100 GHz waveguide band-pass filter employing UV-LIGA micromachining process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 69, pp. 101-105, 2017. The full citation details ...](Pics/full.jpeg) |
2017 |
DBLP DOI BibTeX RDF |
|
23 | N. Scott Barker, Matthew F. Bauwens, Arthur W. Lichtenberger, Robert M. Weikle |
Silicon-on-Insulator Substrates as a Micromachining Platform for Advanced Terahertz Circuits. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Proc. IEEE ![In: Proc. IEEE 105(6), pp. 1105-1120, 2017. The full citation details ...](Pics/full.jpeg) |
2017 |
DBLP DOI BibTeX RDF |
|
23 | Roberta Ramponi |
Femtosecond laser micromachining: An enabling tool for quantum technologies. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICTON ![In: 2017 19th International Conference on Transparent Optical Networks (ICTON), Girona, Spain, July 2-6, 2017, pp. 1, 2017, IEEE, 978-1-5386-0859-3. The full citation details ...](Pics/full.jpeg) |
2017 |
DBLP DOI BibTeX RDF |
|
23 | Binh Xuan Cao, Munju Bae, Hyonkee Sohn, Jiyeon Choi, Youngduk Kim, Jeng-o Kim, Jiwhan Noh |
Design and Performance of a Focus-Detection System for Use in Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 7(1), pp. 2, 2016. The full citation details ...](Pics/full.jpeg) |
2016 |
DBLP DOI BibTeX RDF |
|
23 | Nguyen Van Toan, Masaya Toda, Takahito Ono |
An Investigation of Processes for Glass Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 7(3), pp. 51, 2016. The full citation details ...](Pics/full.jpeg) |
2016 |
DBLP DOI BibTeX RDF |
|
23 | Won-Young Uhm, Tae-Jong Beak, Keun-Kwan Ryu, Sung-Chan Kim |
Reduced Hybrid Ring Coupler Using Surface Micromachining Technology for 94-GHz MMIC Applications. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Inform. and Commun. Convergence Engineering ![In: J. Inform. and Commun. Convergence Engineering 14(4), 2016. The full citation details ...](Pics/full.jpeg) |
2016 |
DBLP DOI BibTeX RDF |
|
23 | Shaolin Xu, Shinsaku Osawa, Ryuichi Kobayashi, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa |
Minimizing Burrs and Defects on Microstructures with Laser Assisted Micromachining Technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Autom. Technol. ![In: Int. J. Autom. Technol. 10(6), pp. 891-898, 2016. The full citation details ...](Pics/full.jpeg) |
2016 |
DBLP DOI BibTeX RDF |
|
23 | Zhen Yu, Quanjie Gao, Ding-Fang Chen |
Study on mathematical model of cutting force in micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Model. Simul. Sci. Comput. ![In: Int. J. Model. Simul. Sci. Comput. 6(4), pp. 1550039:1-1550039:20, 2015. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Daniel Teixidor, Maciej Grzenda, Andrés Bustillo, Joaquim Ciurana |
Modeling pulsed laser micromachining of micro geometries using machine-learning techniques. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Intell. Manuf. ![In: J. Intell. Manuf. 26(4), pp. 801-814, 2015. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Lamia E. L. Fissi, Victor Xhurdebise, Laurent A. Francis |
Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 6(1), pp. 19-31, 2015. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Ilya Alexeev, Johannes Heberle, Kristian Cvecek, Konstantin Yu. Nagulin, Michael Schmidt 0004 |
High Speed Pump-Probe Apparatus for Observation of Transitional Effects in Ultrafast Laser Micromachining Processes. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 6(12), pp. 1914-1922, 2015. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Simas Butkus, Aleksandr Alesenkov, Domas Paipulas, Eugenijus Gaizauskas, Andrius Melninkaitis, Dalia Kaskelyte, Martynas Barkauskas, Valdas Sirutkaitis |
Analysis of the Micromachining Process of Dielectric and Metallic Substrates Immersed in Water with Femtosecond Pulses. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 6(12), pp. 2010-2022, 2015. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Fernando Castaño, Rodolfo E. Haber, Raúl M. del Toro, Gerardo Beruvides |
Conductance sensor for micromachining. A case study on monitoring tool-workpiece contact. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICIT ![In: IEEE International Conference on Industrial Technology, ICIT 2015, Seville, Spain, March 17-19, 2015, pp. 1422-1426, 2015, IEEE, 978-1-4799-7800-7. The full citation details ...](Pics/full.jpeg) |
2015 |
DBLP DOI BibTeX RDF |
|
23 | Rajesh Kumar Porwal, Vinod Yadava |
Modelling of performance characteristics during sinking electrical discharge micromachining of Ti-6Al-4V thin sheet. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Res. ![In: Int. J. Manuf. Res. 9(3), pp. 314-332, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Florian Preusch, Benedikt Adelmann, Ralf Hellmann |
Micromachining of AlN and Al2O3 Using Fiber Laser. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 5(4), pp. 1051-1060, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | K. M. Tanvir Ahmmed, Colin Grambow, Anne-Marie Kietzig |
Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 5(4), pp. 1219-1253, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Rajesh Kumar Porwal, Vinod Yadava, J. Ramkumar |
Neural Network Based Modelling and GRA Coupled PCA Optimization of Hole Sinking Electro Discharge Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Mater. Mech. Eng. ![In: Int. J. Manuf. Mater. Mech. Eng. 4(1), pp. 1-21, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Philipp Scholz, Norbert Herfurth, Michael Sadowski, Ted R. Lundquist, Uwe Kerst, Christian Boit |
Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials - An adaptive calibration algorithm. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. Reliab. ![In: Microelectron. Reliab. 54(9-10), pp. 1794-1797, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Rajesh Kumar Porwal, Vinod Yadava |
Experimentation and prediction of material removal rate of electrical discharge micromachining of nickel-based super alloy thin sheet. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Comput. Aided Eng. Technol. ![In: Int. J. Comput. Aided Eng. Technol. 6(1), pp. 62-73, 2014. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Danqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang 0006, Dacheng Zhang |
Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014, pp. 513-516, 2014, IEEE, 978-1-4799-4726-3. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Fernando Castaño, Rodolfo E. Haber, Raúl M. del Toro, Gerardo Beruvides |
Application of hybrid incremental modeling for predicting surface roughness in micromachining processes. ![Search on Bibsonomy](Pics/bibsonomy.png) |
CIES ![In: 2014 IEEE Symposium on Computational Intelligence for Engineering Solutions, CIES 2014, Orlando, FL, USA, December 9-12, 2014, pp. 54-59, 2014, IEEE, 978-1-4799-4510-8. The full citation details ...](Pics/full.jpeg) |
2014 |
DBLP DOI BibTeX RDF |
|
23 | Zheng Liu, Hua Chen |
Voxel Primitive Based Modeling and Simulating Method for Surface Micromachining Technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
J. Softw. ![In: J. Softw. 8(11), pp. 2881-2889, 2013. The full citation details ...](Pics/full.jpeg) |
2013 |
DBLP DOI BibTeX RDF |
|
23 | Yosuke Koga, Reiko Kuriyama, Yohei Sato, Koichi Hishida, Norihisa Miki |
Effects of Micromachining Processes on Electro-Osmotic Flow Mobility of Glass Surfaces. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Micromachines ![In: Micromachines 4(1), pp. 67-79, 2013. The full citation details ...](Pics/full.jpeg) |
2013 |
DBLP DOI BibTeX RDF |
|
23 | Ahmet Ozcan Nergiz, Ahmet Teoman Naskali, Zhenishbek Zhakypov, Edin Golubovic, Asif Sabanoviç |
Implementation of a novel complex mechatronics software framework on laser micromachining workstation. ![Search on Bibsonomy](Pics/bibsonomy.png) |
EUROCON ![In: Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013, pp. 910-917, 2013, IEEE, 978-1-4673-2230-0. The full citation details ...](Pics/full.jpeg) |
2013 |
DBLP DOI BibTeX RDF |
|
23 | Edin Golubovic, Islam S. M. Khalil, Ahmet Ozcan Nergiz, Eray A. Baran, Asif Sabanoviç |
Design and control of laser micromachining workstation. ![Search on Bibsonomy](Pics/bibsonomy.png) |
AMC ![In: 12th IEEE International Workshop on Advanced Motion Control, AMC 2012, Sarajevo, Bosnia & Herzegovina, March 25-27, 2012, pp. 1-6, 2012, IEEE, 978-1-4577-1072-8. The full citation details ...](Pics/full.jpeg) |
2012 |
DBLP DOI BibTeX RDF |
|
23 | Philipp Blumenthal, Annika Raatz |
Adhesive Workpiece Fixturing for Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IPAS ![In: Precision Assembly Technologies and Systems - 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, Chamonix, France, February 12-15, 2012. Proceedings, pp. 73-80, 2012, Springer, 978-3-642-28162-4. The full citation details ...](Pics/full.jpeg) |
2012 |
DBLP DOI BibTeX RDF |
|
23 | Salvatore Surdo |
Advanced Silicon Microstructuring by Electrochemical Micromachining: Technology and Applications. ![Search on Bibsonomy](Pics/bibsonomy.png) |
|
2012 |
RDF |
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23 | Ravindra Mukhiya, Alvise Bagolini, T. K. Bhattacharyya, Leandro Lorenzelli, M. Zen |
Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 42(1), pp. 127-134, 2011. The full citation details ...](Pics/full.jpeg) |
2011 |
DBLP DOI BibTeX RDF |
|
23 | Anjali V. Kulkarni, Vijay Kumar Jain, Krishna Avtar Misra |
Electrochemical spark micromachining (microchannels and microholes) of metals and non-metals. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 22(2), pp. 107-123, 2011. The full citation details ...](Pics/full.jpeg) |
2011 |
DBLP DOI BibTeX RDF |
|
23 | Anjali V. Kulkarni, Vijay Kumar Jain, Krishna Avtar Misra |
Electrochemical Spark Micromachining: Present Scenario. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Autom. Technol. ![In: Int. J. Autom. Technol. 5(1), pp. 52-59, 2011. The full citation details ...](Pics/full.jpeg) |
2011 |
DBLP DOI BibTeX RDF |
|
23 | Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca |
Study for the micromachining optimization of micro hotplates used in MEMS-CMOS gas sensors. ![Search on Bibsonomy](Pics/bibsonomy.png) |
CCE ![In: 8th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2011, Merida City, Mexico, October 26-28, 2011, pp. 1-6, 2011, IEEE. The full citation details ...](Pics/full.jpeg) |
2011 |
DBLP DOI BibTeX RDF |
|
23 | Margherita Bassu |
Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication. ![Search on Bibsonomy](Pics/bibsonomy.png) |
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2011 |
RDF |
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23 | Jagannath Munda, M. Malapati, Bijoy Bhattacharyya |
Investigation into the influence of Electrochemical Micromachining (EMM) parameters on Radial Overcut through RSM-based approach. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 21(1/2), pp. 54-66, 2010. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
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23 | Alok Kumar Das, Partha Saha |
Micromachining of silicon with excimer laser in air and water medium. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 21(1/2), pp. 42-53, 2010. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
|
23 | Ippei Kono, Naohiko Sugita, Mamoru Mitsuishi |
Simulation of Laser Micromachining in Silica Glass with Absorbent Slurry. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Autom. Technol. ![In: Int. J. Autom. Technol. 4(3), pp. 284-290, 2010. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
|
23 | Min Deng, Wenjing Lu, Yan Wang, Faheng Zang, Guifu Ding |
A novel triode-type carbon nanotube field emission micro-cathode fabricated by using electrochemical and micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010, pp. 191-194, 2010, IEEE, 978-1-4244-6543-9. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
|
23 | Dugan Um, Bahram Asiabanpour, David Foor, Mathew Kurtz, Mary Tellers, Todd McGregor |
Micro scale silicon dioxide gear fabrication by bulk micromachining process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010, pp. 860-864, 2010, IEEE, 978-1-4244-6543-9. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
|
23 | Bo Liu, Zhiqiu Lv, Zhihong Li, Xunjun He, Yilong Hao |
A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010, pp. 620-623, 2010, IEEE, 978-1-4244-6543-9. The full citation details ...](Pics/full.jpeg) |
2010 |
DBLP DOI BibTeX RDF |
|
23 | Richárd Berényi |
Prototyping of a reliable 3D flexible IC cube package by laser micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. Reliab. ![In: Microelectron. Reliab. 49(7), pp. 800-805, 2009. The full citation details ...](Pics/full.jpeg) |
2009 |
DBLP DOI BibTeX RDF |
|
23 | Mohammad Mayyas, Panos S. Shiakolas |
Microsurface Reverse Engineering and Compensation for Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IEEE Trans Autom. Sci. Eng. ![In: IEEE Trans Autom. Sci. Eng. 6(2), pp. 291-301, 2009. The full citation details ...](Pics/full.jpeg) |
2009 |
DBLP DOI BibTeX RDF |
|
23 | Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun 0003, Yunxia Guo |
Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009, pp. 90-93, 2009, IEEE Computer Society, 978-1-4244-4629-2. The full citation details ...](Pics/full.jpeg) |
2009 |
DBLP DOI BibTeX RDF |
|
23 | Chen-Kuei Chung, T. R. Shih, B. H. Wu |
Characteristics of truncate-angle rhombic micromixer and rapid mold fabrication using CO2 laser micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
NEMS ![In: 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009, pp. 535-538, 2009, IEEE Computer Society, 978-1-4244-4629-2. The full citation details ...](Pics/full.jpeg) |
2009 |
DBLP DOI BibTeX RDF |
|
23 | Jerzy Kozak, D. Gulbinowicz, Z. Gulbinowicz |
The Mathematical Modeling and Computer Simulation of Pulse Electrochemical Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Eng. Lett. ![In: Eng. Lett. 16(4), pp. 556-561, 2008. The full citation details ...](Pics/full.jpeg) |
2008 |
DBLP BibTeX RDF |
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23 | Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat |
Bulk micromachining for SOI based microsystems using double side XeF2 etching. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 13(2/3/4), pp. 297-307, 2008. The full citation details ...](Pics/full.jpeg) |
2008 |
DBLP DOI BibTeX RDF |
|
23 | Mark J. Jackson, Grant M. Robinson, Mike P. Brady |
Micromachining of bipolar plates used in proton exchange membrane fuel cells. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 13(2/3/4), pp. 124-145, 2008. The full citation details ...](Pics/full.jpeg) |
2008 |
DBLP DOI BibTeX RDF |
|
23 | Xiang-meng Jing, Di Chen, Dong-Ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen |
Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 38(1), pp. 120-124, 2007. The full citation details ...](Pics/full.jpeg) |
2007 |
DBLP DOI BibTeX RDF |
|
23 | Raquel Hellin-Rico, Jean Pierre Celis, Kris Baert, Chris Van Hoof, Ann Witvrouw |
A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C ![Search on Bibsonomy](Pics/bibsonomy.png) |
CoRR ![In: CoRR abs/0711.3317, 2007. The full citation details ...](Pics/full.jpeg) |
2007 |
DBLP BibTeX RDF |
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23 | Kanishka Biswas, Soumen K. Das, D. K. Maurya, S. Kal, S. K. Lahiri 0001 |
Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 37(4), pp. 321-327, 2006. The full citation details ...](Pics/full.jpeg) |
2006 |
DBLP DOI BibTeX RDF |
|
23 | Kanishka Biswas, S. Kal |
Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 37(6), pp. 519-525, 2006. The full citation details ...](Pics/full.jpeg) |
2006 |
DBLP DOI BibTeX RDF |
|
23 | Hyung-Jung Kim, Won-Shik Chu, Sung-Hoon Ahn, Dong-Soo Kim, Cha-Soo Jun |
Web-based design and manufacturing systems for micromachining: Comparison of architecture and usability. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Comput. Appl. Eng. Educ. ![In: Comput. Appl. Eng. Educ. 14(3), pp. 169-177, 2006. The full citation details ...](Pics/full.jpeg) |
2006 |
DBLP DOI BibTeX RDF |
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23 | S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi |
Fabrication of 128×128 element optical switch array by micromachining technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microprocess. Microsystems ![In: Microprocess. Microsystems 29(1), pp. 21-25, 2005. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
|
23 | S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi |
Fabrication of 128×128 element optical switch array by micromachining technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 36(1), pp. 91-95, 2005. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
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23 | A. Pavolotsky, D. Meledin, C. Risacher, M. Pantaleev, V. Belitsky |
Micromachining approach in fabricating of THz waveguide components. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 36(7), pp. 683-686, 2005. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
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23 | Z. Moktadir, H. Wensink, Michael Kraft |
Analytical model of micromachining of brittle materials with sharp particles. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. J. ![In: Microelectron. J. 36(3-6), pp. 608-611, 2005. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
|
23 | Muthukuruman Packirisamy, Ion Stiharu, L. Flores |
Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Manuf. Technol. Manag. ![In: Int. J. Manuf. Technol. Manag. 7(2/3/4), pp. 224-245, 2005. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
|
23 | Mohammad A. Mayyas, Panos S. Shiakolas |
Application of Thin Plate Splines for Surface Reverse Engineering and Compensation for Femtosecond Laser Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ISIC ![In: Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation, Limassol, Cyprus, 27-29 June, 2005, pp. 125-130, 2005, IEEE, 0-7803-8936-0. The full citation details ...](Pics/full.jpeg) |
2005 |
DBLP DOI BibTeX RDF |
|
23 | Francisco Tejada, Andreas G. Andreou, Dennis K. Wickenden, Arthur S. Francomacaro |
Surface micromachining in Silicon on Sapphire CMOS technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ISCAS (4) ![In: Proceedings of the 2004 International Symposium on Circuits and Systems, ISCAS 2004, Vancouver, BC, Canada, May 23-26, 2004, pp. 920-923, 2004, IEEE, 0-7803-8251-X. The full citation details ...](Pics/full.jpeg) |
2004 |
DBLP BibTeX RDF |
|
23 | Alan Bonifas, Blaine Lilly |
Design of an Electrochemical Cell for micromachining Applications. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Trans. SDPS ![In: Trans. SDPS 7(1), pp. 1-23, 2003. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP BibTeX RDF |
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23 | Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park 0001, Donghun Kwak, Taeyong Song, William Carr, James Bus |
A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Comput. Eng. Sci. ![In: Int. J. Comput. Eng. Sci. 4(3), pp. 493-496, 2003. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP DOI BibTeX RDF |
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23 | Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller |
Advanced Silicon Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Comput. Eng. Sci. ![In: Int. J. Comput. Eng. Sci. 4(2), pp. 151, 2003. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP DOI BibTeX RDF |
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23 | Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu |
Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Int. J. Comput. Eng. Sci. ![In: Int. J. Comput. Eng. Sci. 4(3), pp. 509-512, 2003. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP DOI BibTeX RDF |
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23 | Robert Fedosejevs, Michael A. Argument, Arzu Sardarli, Sean E. Kirkwood, Robert Holenstein, Ying Y. Tsui |
Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. ![Search on Bibsonomy](Pics/bibsonomy.png) |
ICMENS ![In: 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada, pp. 53-, 2003, IEEE Computer Society, 0-7695-1947-4. The full citation details ...](Pics/full.jpeg) |
2003 |
DBLP DOI BibTeX RDF |
|
23 | Seongho Cho |
Laser micromachining of active and passive photonic integrated circuits. ![Search on Bibsonomy](Pics/bibsonomy.png) |
|
2003 |
RDF |
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23 | M. Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet, Guy Perez, Jean Marc Nicot, Coumar Oudéa |
Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Microelectron. Reliab. ![In: Microelectron. Reliab. 42(9-11), pp. 1777-1782, 2002. The full citation details ...](Pics/full.jpeg) |
2002 |
DBLP DOI BibTeX RDF |
|
23 | Leonard Dvorson |
Micromachining and modeling of focused field emitters for flat panel displays. ![Search on Bibsonomy](Pics/bibsonomy.png) |
|
2001 |
RDF |
|
23 | Brett Warneke, Kristofer S. J. Pister |
An Integrated Circuit for the in Situ Characterization of CMOS Best-Process Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
SBCCI ![In: Proceedings of the 13th Annual Symposium on Integrated Circuits and Systems Design, SBCCI 2000, Manaus, Brazil, September 18-24, 2000, pp. 333-340, 2000, IEEE Computer Society, 0-7695-0843-X. The full citation details ...](Pics/full.jpeg) |
2000 |
DBLP BibTeX RDF |
|
23 | Peter J. Hesketh |
Micromachining. ![Search on Bibsonomy](Pics/bibsonomy.png) |
The VLSI Handbook ![In: The VLSI Handbook., 1999, CRC Press, 978-0-8493-8593-3. The full citation details ...](Pics/full.jpeg) |
1999 |
DBLP DOI BibTeX RDF |
|
23 | W. L. Jin, C. D. Mote |
Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IEEE Trans. Instrum. Meas. ![In: IEEE Trans. Instrum. Meas. 47(3), pp. 715-719, 1998. The full citation details ...](Pics/full.jpeg) |
1998 |
DBLP DOI BibTeX RDF |
|
23 | Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen |
Bulk micromachining of silicon. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Proc. IEEE ![In: Proc. IEEE 86(8), pp. 1536-1551, 1998. The full citation details ...](Pics/full.jpeg) |
1998 |
DBLP DOI BibTeX RDF |
|
23 | James M. Bustillo, Roger T. Howe, Richard S. Muller |
Surface micromachining for microelectromechanical systems. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Proc. IEEE ![In: Proc. IEEE 86(8), pp. 1552-1574, 1998. The full citation details ...](Pics/full.jpeg) |
1998 |
DBLP DOI BibTeX RDF |
|
23 | Henry Guckel |
High-aspect-ratio micromachining via deep X-ray lithography. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Proc. IEEE ![In: Proc. IEEE 86(8), pp. 1586-1593, 1998. The full citation details ...](Pics/full.jpeg) |
1998 |
DBLP DOI BibTeX RDF |
|
23 | Ming C. Wu |
Micromachining for optical and optoelectronic systems. ![Search on Bibsonomy](Pics/bibsonomy.png) |
Proc. IEEE ![In: Proc. IEEE 85(11), pp. 1833-1856, 1997. The full citation details ...](Pics/full.jpeg) |
1997 |
DBLP DOI BibTeX RDF |
|
23 | A. Bruno Frazier |
Recent applications of polyimide to micromachining technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IEEE Trans. Ind. Electron. ![In: IEEE Trans. Ind. Electron. 42(5), pp. 442-448, 1995. The full citation details ...](Pics/full.jpeg) |
1995 |
DBLP DOI BibTeX RDF |
|
23 | Ren C. Luo, Zhenhai Chen |
Modeling and implementation of an innovative micro proximity sensor using micromachining technology. ![Search on Bibsonomy](Pics/bibsonomy.png) |
IROS ![In: Proceedings of 1993 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 1993, Tokyo, Japan, July 26 - 30, 1993, pp. 1709-1716, 1993, IEEE, 0-7803-0823-9. The full citation details ...](Pics/full.jpeg) |
1993 |
DBLP DOI BibTeX RDF |
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