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Found 149 publication records. Showing 149 according to the selection in the facets
Hits ?▲ |
Authors |
Title |
Venue |
Year |
Link |
Author keywords |
170 | Andreas Pflug, Michael Siemers, Bernd Szyszka |
Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering. |
PVM/MPI |
2006 |
DBLP DOI BibTeX RDF |
|
107 | Seeun Jang, Jayoung Cho, Keesam Jeong, Gilsoo Cho |
Exploring Possibilities of ECG Electrodes for Bio-monitoring Smartwear with Cu Sputtered Fabrics. |
HCI (2) |
2007 |
DBLP DOI BibTeX RDF |
bio-monitoring, smartwear, sputtering, Electrocardiogram (ECG), E-textiles |
43 | Kyung Eun Park, Shun'ichiro Ohmi |
The Influence of High-Temperature Sputtering on the N-Doped LaB6 Thin Film Formation Utilizing RF Sputtering. |
IEICE Trans. Electron. |
2020 |
DBLP DOI BibTeX RDF |
|
43 | Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino |
Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature. |
Sci. China Inf. Sci. |
2012 |
DBLP DOI BibTeX RDF |
|
33 | Mark A. Johnson, Fang Yee, Mick Cipollo, Krystyna Truszkowska, John P. Verboncoeur |
OOPIC simulation of a cylindrical magnetron glow discharge. |
SpringSim |
2008 |
DBLP DOI BibTeX RDF |
OOPIC, glow discharge, plasma, sputtering magnetron, particle-in-cell |
25 | Seok Min Kim, Sung Hun Kim, Eun Ju Park, Dong Lyun Cho, Moo Sung Lee |
Gold Coating of a Plastic Optical Fiber Based on PMMA. |
HCI (3) |
2009 |
DBLP DOI BibTeX RDF |
plastic optical fiber, POF, sidelight, overcoating |
25 | Wing-Man Tang, Cheung H. Leung, Pui-To Lai |
Effects of Insulator Thickness on the Sensing Properties of MISiC Schottky-Diode Hydrogen Sensor. |
DELTA |
2008 |
DBLP DOI BibTeX RDF |
Hydrogen sensor, silicon carbide, SiO2 |
25 | Eui-Jung Yun, Hyun-Joon Jin, Nho-Kyung Park |
Development of the hydrogen gas sensor for the nondestructive test evaluation (NDE) application. |
ISCAS (5) |
1999 |
DBLP DOI BibTeX RDF |
|
25 | Joachim Pelka, K. P. Muller, Hermann Mader |
Simulation of dry etch processes by COMPOSITE. |
IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. |
1988 |
DBLP DOI BibTeX RDF |
|
22 | Kazuki Shishikura, Hiroyuki Nabae, Akihiro Matsutani, Mina Sato, Koichi Suzumori |
Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering. |
SII |
2024 |
DBLP DOI BibTeX RDF |
|
22 | Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann |
Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales. |
CoRR |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi |
Kr-Plasma Sputtering for Pt Gate Electrode Deposition on MFSFET with 5 nm-Thick Ferroelectric Nondoped HfO2 Gate Insulator for Analog Memory Application. |
IEICE Trans. Electron. |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Rodica Plugaru, Iuliana Mihalache, Cosmin Romanitan, Florin Comanescu, Silviu Vulpe, Gabriel Craciun, Neculai Plugaru, Nikolay Djourelov |
Light-Sensing Properties of Amorphous Vanadium Oxide Films Prepared by RF Sputtering. |
Sensors |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Aitor Bikarregi, Santiago Dominguez, Marta Brizuela, Alejandra López, Ana Suarez-Vega, Cecilia Agustín-Sáenz, Micael Presa, Gabriel A. López |
Direct Fabrication of a Copper RTD over a Ceramic-Coated Stainless-Steel Tube by Combination of Magnetron Sputtering and Sol-Gel Techniques. |
Sensors |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Iulian Iordache, Arcadie Sobetkii, Elena Chitanu, Gabriela Beatrice Sbarcea, Virgil Marinescu, Cristina Antonela Banciu, Delia Patroi |
Influence of Deposition Time on the Opto-Electronic Properties of 400 °C Annealed ITO Thin Films Deposited by DC Magnetron Sputtering. |
ICTON |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Hichem Ferhati, K. Kacha, Adel Bendjerad, Fayçal Djeffal, Abdelhamid Benhaya |
Optical and Electrical Properties of Annealed AZO/Ag/AZO Multilayer Deposited Using RF Sputtering Technique. |
CCE |
2023 |
DBLP DOI BibTeX RDF |
|
22 | D. A. Andrés-Chavarría, N. E. Vázquez-Barragán, Sandra Andrea Mayén-Hernández, Jose Santos-Cruz, C. E. Pérez-García, Francisco Javier De Moure-Flores |
Effect of the CdTe absorber layer's thickness synthesized by the RF sputtering on the performance of CdTe photovoltaic windows. |
CCE |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Shun'ichiro Ohmi, Masakazu Tanuma, Joong-Won Shin |
Precise VTH Control of MFSFET with 5 nm-thick FeND-HfO2 Realized by Kr-Plasma Sputtering for Pt Gate Electrode Deposition. |
DRC |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp |
Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance. |
PLANS |
2023 |
DBLP DOI BibTeX RDF |
|
22 | Sara Kim, Nam-Hoon Kim |
Electronic Structure and Thermoelectric Properties of Mg2Sn Films Fabricated by Using Co-Sputtering Process With Stoichiometric Modification. |
IEEE Access |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann |
Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. |
CoRR |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Eun-Ki Hong, Kyung Eun Park, Shun'ichiro Ohmi |
Sputtering Gas Pressure Dependence on the LaBxNy Insulator Formation for Pentacene-Based Back-Gate Type Floating-Gate Memory with an Amorphous Rubrene Passivation Layer. |
IEICE Trans. Electron. |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi |
MFSFET with 5nm Thick Ferroelectric Nondoped HfO2 Gate Insulator Utilizing Low Power Sputtering for Pt Gate Electrode Deposition. |
IEICE Trans. Electron. |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Cátia Magro, Oriana C. Gonçalves, Marcelo Morais, Paulo A. Ribeiro 0001, Susana Sério, Pedro Vieira 0002, Maria Raposo |
Volatile Organic Compound Monitoring during Extreme Wildfires: Assessing the Potential of Sensors Based on LbL and Sputtering Films. |
Sensors |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Jonathan Ortiz Vázquez, Ramon Peña-Sierra, Lucia Juarez-Amador, Miguel Galvan Arellano |
Amorphous-Ga2O3/GaAs(100) anisotype heterojunctions with amorphous-Ga2O3 n-type films grown by magnetron sputtering. |
CCE |
2022 |
DBLP DOI BibTeX RDF |
|
22 | Christian Woelfel, Moritz Oberberg, Birk Berger, Dennis Engel, Ralf Peter Brinkmann, Julian Schulze, Peter Awakowicz, Jan Lunze |
Control-oriented plasma modeling and controller design for reactive sputtering. |
IFAC J. Syst. Control. |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Fabi Zhang, Jinyu Sun, Haiou Li, Juan Zhou, Rong Wang, Tangyou Sun, Tao Fu, Gongli Xiao, Qi Li, Xingpeng Liu, Xiuyun Zhang, Daoyou Guo, Xianghu Wang, Zujun Qin |
Band-gap tunable (GaxIn1-x)2O3 layer grown by magnetron sputtering. |
Frontiers Inf. Technol. Electron. Eng. |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Salah Eddine Chouaib Refas, Abdelkader Bouazza, Youcef Belhadji |
3D sputtering simulations of the CZTS, Si and CIGS thin films using Monte-Carlo method. |
Monte Carlo Methods Appl. |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Z. Zaaboub, F. Hassen, L. Chaabane, H. Maaref |
Photoluminescence and time resolved photoluminescence properties in as grown ZnO thin films prepared by DC reactive sputtering for optoelectronic devices. |
Microelectron. J. |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Tobias Gergs, Borislav Borislavov, Jan Trieschmann |
An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. |
CoRR |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Shokirbek Shermukhamedov, Michael Probst, Lei Chen |
Neural Network Based Molecular Dynamics Simulations of Sputtering Processes. |
e-Science |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Javier Sotelo Medina, Daniel Ortiz Gutiérrez, Vyacheslav Elyukhin, Ramon Peña-Sierra |
Synthesis and Characterization of Ge Nanoclusters in Amorphous GeOx(x∼0.1) Nano-Films Grown by Magnetron Sputtering. |
CCE |
2021 |
DBLP DOI BibTeX RDF |
|
22 | András Kelemen, Róbert Rossi Madarász |
Reactive magnetron sputtering: an offline parameter identification method. |
SACI |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Wonjoo Kim, Dirk J. Wouters, Rainer Waser, Vikas Rana |
Tuning the Memory Window of TaOx ReRAM Using the RF Sputtering Power. |
ISCAS |
2021 |
DBLP DOI BibTeX RDF |
|
22 | Shun'ichiro Ohmi, Shin Ishimatsu, Yuske Horiuchi, Sohya Kudoh |
In-Situ N2-Plasma Nitridation for High-k HfN Gate Insulator Formed by Electron Cyclotron Resonance Plasma Sputtering. |
IEICE Trans. Electron. |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert, Omar Elmazria |
Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications. |
Sensors |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Koji Yuhashi, Michiko Nishiyama, Junichi Ida, Shoichi Kubodera, Kazuhiro Watanabe |
Temperature characteristics of hetero-core optical fiber Au/TiO2 SPR sensors fabricated by sputtering and Layer-by-Layer stacking techniques. |
IEEE SENSORS |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki |
Commercial Production of Low-k PZT film using Sputtering Method. |
IEEE SENSORS |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Kyung Eun Park, Shun'ichiro Ohmi |
High-k LaBxNy gate insulator formed by the Ar/N2 plasma sputtering of N-doped LaB6 metal thin films and its application to floating-gate memory. |
DRC |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Shun'ichiro Ohmi, Min Gee Kim, Masakazu Kataoka, Masaki Hayashi, Rengie Mark D. Mailig |
Low-Voltage Operation of MFSFET with Ferroelectric Nondoped HfO2 Formed by Kr/O2-Plasma Sputtering. |
DRC |
2020 |
DBLP DOI BibTeX RDF |
|
22 | Boxue Du, Zehua Wang, Jin Li 0019, Mi Xiao, Hucheng Liang |
Surface FGM Insulator Based on BaTiO3 Magnetron Sputtering for Electric Field Grading of AC Gas Insulated Power Apparatus. |
IEEE Access |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Binjian Zeng, Jiajia Liao, Qiangxiang Peng, Min Liao, Yichun Zhou, Shun'ichiro Ohmi |
The Effect of Kr/O2 Sputtering on the Ferroelectric Properties of SrBi2Ta2O9 Thin Film Formation. |
IEICE Trans. Electron. |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Qiuwei Xing, Haijiang Wang, Mingbiao Chen, Zhaoyun Chen, Rongbin Li, Peipeng Jin, Yong Zhang 0003 |
Mechanical Properties and Corrosion Resistance of NbTiAlSiZrNx High-Entropy Films Prepared by RF Magnetron Sputtering. |
Entropy |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Wei-Bing Liao, Hongti Zhang, Zhi-Yuan Liu, Pei-Feng Li, Jian-Jun Huang, Chun-Yan Yu, Yang Lu 0002 |
High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering. |
Entropy |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Zulema Rebollar Rivera, Arturo Maldonado-Alvarez, María de la Luz Olvera-Amador |
Effect of Thickness on Photocatalytic Properties of ZnO thin films Deposited by RF Magnetron Sputtering. |
CCE |
2019 |
DBLP DOI BibTeX RDF |
|
22 | David Santos Cuz, María de la Luz Olvera-Amador, Francisco Javier De Moure-Flores, Jose Santos-Cruz |
Comparative Analisis of CdS Thin Flims deposited by CBD and RF-Sputtering. |
CCE |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Andrea Fasoli, L. Thornquist, K. Lionti, Linda K. Sundberg, L. Bozano |
Sputtering of Metal Oxide Semiconductor n-p Stacks. |
ISOEN |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Lionel Presmanes, Vignesh Gunasekaran, Yohann Thimont, Inthuga Sinnarasa, Antoine Barnabé, Philippe Ménini, Philippe Tailhades |
Ga doped ZnO thin films deposited by RF sputtering for NO2 sensing. |
exp.at |
2019 |
DBLP DOI BibTeX RDF |
|
22 | Mitchell Hsing |
Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication. |
|
2019 |
RDF |
|
22 | Kai Bo, Xue Zhou, Guofu Zhai, Mo Chen |
Simulation of Metal Droplet Sputtering and Molten Pool on Copper Contact under Electric Arc. |
IEICE Trans. Electron. |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Xinghao Liang, Yang Li, Qiang Zhao 0004, Zheng Zhang, Xiaoping Ouyang 0001 |
Effect of Carbon Concentration on the Sputtering of Carbon-Rich SiC Bombarded by Helium Ions. |
Comput. |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Florian Krüger, Tobias Gergs, Jan Trieschmann |
Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations. |
CoRR |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Hee Pyung Park, Sang Woo Kim, Joong-Won Shin, Won-Ju Cho, Jong Tae Park 0003 |
Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors. |
Microelectron. Reliab. |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Yong Zhang 0003, Xue-Hui Yan, Wei-Bing Liao, Kun Zhao |
Effects of Nitrogen Content on the Structure and Mechanical Properties of (Al0.5CrFeNiTi0.25)Nx High-Entropy Films by Reactive Sputtering. |
Entropy |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Changbao Wen, Taotao Niu, Yue Ma, Nan Gao, Feng Ru |
Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering. |
Sensors |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Shea-Jue Wang, Mu-Chun Wang, Shih-Fan Chen, Yu-Hsiang Li, Tien-Szu Shen, Hui-Yun Bor, Chao-Nan Wei |
Electrical and Physical Characteristics of WO3/Ag/WO3 Sandwich Structure Fabricated with Magnetic-Control Sputtering Metrology †. |
Sensors |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Abid Iqbal, Faisal Mohd-Yasin |
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review. |
Sensors |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Akinobu Teramoto, Keiichi Hashimoto, Tomoyuki Suwa, Jun-ichi Tsuchimoto, Marie Hayashi, Hyeonwoo Park, Shigetoshi Sugawa |
Reliability of MgO in magnetic tunnel junctions formed by MgO sputtering and Mg oxidation. |
IRPS |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Takafumi Kubota, Keishiro Hirata, Shinji Takayanagi, Mami Matsukawa |
Control of hydroxyapatite film orientation by RF magnetron sputtering. |
EMBC |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Bian Tian, Zhongkai Zhang, Zhe Du, Qiuyue Yu, Qijing Lin, Na Zhao 0001, Zhuangde Jiang |
Influence of Magnetron Sputtering Parameters on Heat Volatilization Property of Tungsten-Rhenium Thin Film Thermocouples. |
NEMS |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Xingkai Lin, Yanlei Wang, Guifu Ding, Congchun Zhang |
Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering. |
NEMS |
2018 |
DBLP DOI BibTeX RDF |
|
22 | K. R. Khiangte Amlta, A. Laha, S. Mahapatra, U. Gangway |
Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI. |
DRC |
2018 |
DBLP DOI BibTeX RDF |
|
22 | L. C. Silva, B. Barrocas, M. E. Melo Jorge, Susana Sério |
Photocatalytic Degradation of Rhodamine 6G using TiO2/WO3 Bilayered Films Produced by Reactive Sputtering. |
PHOTOPTICS |
2018 |
DBLP DOI BibTeX RDF |
|
22 | Steven Arbeltier |
Optimisation de dépôts de LIPON par pulvérisation magnétron RadioFréquence pour la fabrication de micro-batteries. Modélisation de l'interaction plasma-surface. (Optimisation of LIPON deposit by RadioFrequency magnetron sputtering for micro-batteries production. Plasma-surface interaction modeling). |
|
2018 |
RDF |
|
22 | Joaquin Ascorbe, Jesús M. Corres, Francisco J. Arregui, Ignacio R. Matías |
Humidity Sensor Based on Bragg Gratings Developed on the End Facet of an Optical Fiber by Sputtering of One Single Material. |
Sensors |
2017 |
DBLP DOI BibTeX RDF |
|
22 | Li Wang, Xiu-Mei Wan, Ran Gao, Dan-Feng Lu, Zhimei Qi |
Nanoporous Gold Films Prepared by a Combination of Sputtering and Dealloying for Trace Detection of Benzo[a]pyrene Based on Surface Plasmon Resonance Spectroscopy. |
Sensors |
2017 |
DBLP DOI BibTeX RDF |
|
22 | Joaquin Ascorbe, Jesús M. Corres, Francisco J. Arregui, Ignacio Raúl Matías |
Refractive index sensing performance of a Bragg grating built up on the tip of an optical fiber by reactive sputtering. |
IEEE SENSORS |
2017 |
DBLP DOI BibTeX RDF |
|
22 | Alessandro Chiasera, Francesco Scotognella, Dominik Dorosz, Gianluca Galzerano, Anna Lukowiak, Davor Ristic, Giorgio Speranza, Iustyna Vasilchenko, Alessandro Vaccari 0001, Sreeramulu Valligatla, Stefano Varas, Lidia Zur, Mile Ivanda, Alessandro Martucci, Giancarlo Cesare Righini, Stefano Taccheo, Roberta Ramponi, Maurizio Ferrari |
Glass based structures fabricated by rf-sputtering. |
MIPRO |
2017 |
DBLP DOI BibTeX RDF |
|
22 | Abdelkader Bouazza, Abderrahmane Settaouti |
Study and simulation of the sputtering process of material layers in plasma. |
Monte Carlo Methods Appl. |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Kun-Neng Chen, Chao-Ming Hsu, Jing Liu, Yu-Chen Liou, Cheng-Fu Yang |
Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters. |
Micromachines |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Wenjie Sheng, Xiao Yang, Cong Wang, Yong Zhang 0003 |
Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering. |
Entropy |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Nithi Atthi, Shun'ichiro Ohmi |
Investigation of bilayer HfNx gate insulator utilizing ECR plasma sputtering. |
IEICE Electron. Express |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Alessandro Chiasera, Iustyna Vasilchenko, Dominik Dorosz, M. Cotti, Stefano Varas, E. Iacob, Giorgio Speranza, Alessandro Vaccari 0001, Sreeramulu Valligatla, Lidia Zur, Anna Lukowiak, Giancarlo Cesare Righini, M. Ferrari |
RF-sputtering derived phosphosilicate planar waveguides activated by Er3+ ions. |
ICTON |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Saraí Vázquez, Antonio Olivares, Ismael Cosme, Svetlana Mansurova, Andrey Kosarev, Adrian Itzmoyotl |
Study of optoelectronics properties of indium tin oxide films fabricated by sputtering in oxygen atmosphere. |
CCE |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Anjie Ming, Weibing Liu, Lingling Li, Xilong Sun, Xuan Zheng, Weibing Wang, Qiulin Tan, Jijun Xiong, Dapeng Chen |
Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering. |
NEMS |
2016 |
DBLP DOI BibTeX RDF |
|
22 | Xiaorong Chen, Jie Feng, Haili Ma |
The resistive switching characteristics in tantalum oxide-based RRAM device via combining high-temperature sputtering with plasma oxidation. |
NVMTS |
2015 |
DBLP DOI BibTeX RDF |
|
22 | Dae-Hee Han, Shun'ichiro Ohmi, Tomoyuki Suwa, Philippe Gaubert, Tadahiro Ohmi |
Influence of Si Surface Roughness on Electrical Characteristics of MOSFET with HfON Gate Insulator Formed by ECR Plasma Sputtering. |
IEICE Trans. Electron. |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Yih-Shing Lee, Tung-Wei Yen, Cheng-I Lin, Horng-Chih Lin, Yun Yeh |
Electrical characteristics of amorphous In-Ga-Zn-O thin-film transistors prepared by radio frequency magnetron sputtering with varying oxygen flows. |
Displays |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Jayaraman Vinoth Kumar, Arturo Maldonado, Yasuhiro Matsumoto, María de la Luz Olvera-Amador |
Effect of rf power on structural, optical and morphological properties of ultrathin undoped ZnO films deposited by rf magnetron sputtering. |
CCE |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Young Sik Song, Yunho Han, Tai Hong Yim |
Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting. |
3DIC |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata |
Influence of target-target distance for composition distribution in new facing targets sputtering. |
MHS |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Koji Eriguchi, Yoshinori Takao, Kouichi Ono |
A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. |
ICICDT |
2014 |
DBLP DOI BibTeX RDF |
|
22 | Naoki Honda, Akito Honda |
Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering. |
IEICE Trans. Electron. |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Lúcia Gomes, Ana Marques, Aida Branco, Jorge Araújo, Mário Simões, Susana Cardoso, Fernando Silva, Inês Henriques, César A. T. Laia, Cláudia Costa |
IZO deposition by RF and DC sputtering on paper and application on flexible electrochromic devices. |
Displays |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Hei Wong, B. L. Yang, Shurong Dong |
Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique. |
Microelectron. Reliab. |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Dae-Hee Han, Huiseong Han, Shun'ichiro Ohmi |
Impact of Si surface roughness on MOSFET characteristics with ultrathin HfON gate insulator formed by ECR plasma sputtering. |
IEICE Electron. Express |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Tomoya Syudou, Kazuyoshi Tsuchiya |
Creation of the high functional painless micro needle using the sputtering method. |
MHS |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, Seiichi Hata |
Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks. |
MHS |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Sergey Belikov |
Constrained optimization of rotating magnetron in low-pressure plasma sputtering. |
ACC |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Miao Yu, Tim Giffney, Kean C. Aw, Haixia Zhang 0002 |
Effect of RF sputtering parameters on PZT crystal growth. |
NEMS |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Chuhang Zhang, Hironori Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima |
Development of cluster ion source based on modulated pulse power magnetron sputtering technique. |
NEMS |
2013 |
DBLP DOI BibTeX RDF |
|
22 | Hung-Chun Lin, Chao-Ton Su, Chi-Ching Wang, Bing-Hung Chang, Rei-Cheng Juang |
Parameter optimization of continuous sputtering process based on Taguchi methods, neural networks, desirability function, and genetic algorithms. |
Expert Syst. Appl. |
2012 |
DBLP DOI BibTeX RDF |
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22 | Akio Ohta, Yuta Goto, Shingo Nishigaki, Guobin Wei, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki |
Characterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering. |
IEICE Trans. Electron. |
2012 |
DBLP DOI BibTeX RDF |
|
22 | Li Yan, Ping-Yang Wang, Yang-Hua Ou, Xiao-Lu Kang |
Numerical Study of Hall Thruster Plume and Sputtering Erosion. |
J. Appl. Math. |
2012 |
DBLP DOI BibTeX RDF |
|
22 | Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino |
Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display. |
Sci. China Inf. Sci. |
2012 |
DBLP DOI BibTeX RDF |
|
22 | Antonio A. Gentile |
Review of strategies for a comprehensive simulation in sputtering devices |
CoRR |
2012 |
DBLP BibTeX RDF |
|
22 | Huiseong Han, Shun'ichiro Ohmi |
Hafnium-nitride gate insulator formed by electron-cyclotron-resonance plasma sputtering. |
IEICE Electron. Express |
2012 |
DBLP DOI BibTeX RDF |
|
22 | J. Alarcon-Salazar, Mariano Aceves-Mijares, S. Roman-Lopez, Ciro Falcony |
Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering. |
CCE |
2012 |
DBLP DOI BibTeX RDF |
|
22 | P. Ratanapreechachai, Isaku Kanno, M. Sato |
Sputtering Deposition of Lead-free Piezoelectric (K, Na)NbO3 Thin Films. |
ICETET |
2012 |
DBLP DOI BibTeX RDF |
|
22 | Seiji Nakashima, Yusuke Takada, Taiki Ito, Syota Seto, Hironori Fujisawa, Masafumi Kobune, Masaru Shimizu |
Preparation and Characterization of High Quality Lead-free BiFeO3 Thin Films by Sputtering Process. |
ICETET |
2012 |
DBLP DOI BibTeX RDF |
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