Search results for "sputtering"

Hits ?▲	Authors	Title	Venue	Year	Link	Author keywords
170	Andreas Pflug, Michael Siemers, Bernd Szyszka	Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering.	PVM/MPI	2006	DBLP DOI BibTeX RDF
107	Seeun Jang, Jayoung Cho, Keesam Jeong, Gilsoo Cho	Exploring Possibilities of ECG Electrodes for Bio-monitoring Smartwear with Cu Sputtered Fabrics.	HCI (2)	2007	DBLP DOI BibTeX RDF	bio-monitoring, smartwear, sputtering, Electrocardiogram (ECG), E-textiles
43	Kyung Eun Park, Shun'ichiro Ohmi	The Influence of High-Temperature Sputtering on the N-Doped LaB6 Thin Film Formation Utilizing RF Sputtering.	IEICE Trans. Electron.	2020	DBLP DOI BibTeX RDF
43	Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino	Influence of sputtering power on properties of ZnO thin films fabricated by RF sputtering in room temperature.	Sci. China Inf. Sci.	2012	DBLP DOI BibTeX RDF
33	Mark A. Johnson, Fang Yee, Mick Cipollo, Krystyna Truszkowska, John P. Verboncoeur	OOPIC simulation of a cylindrical magnetron glow discharge.	SpringSim	2008	DBLP DOI BibTeX RDF	OOPIC, glow discharge, plasma, sputtering magnetron, particle-in-cell
25	Seok Min Kim, Sung Hun Kim, Eun Ju Park, Dong Lyun Cho, Moo Sung Lee	Gold Coating of a Plastic Optical Fiber Based on PMMA.	HCI (3)	2009	DBLP DOI BibTeX RDF	plastic optical fiber, POF, sidelight, overcoating
25	Wing-Man Tang, Cheung H. Leung, Pui-To Lai	Effects of Insulator Thickness on the Sensing Properties of MISiC Schottky-Diode Hydrogen Sensor.	DELTA	2008	DBLP DOI BibTeX RDF	Hydrogen sensor, silicon carbide, SiO2
25	Eui-Jung Yun, Hyun-Joon Jin, Nho-Kyung Park	Development of the hydrogen gas sensor for the nondestructive test evaluation (NDE) application.	ISCAS (5)	1999	DBLP DOI BibTeX RDF
25	Joachim Pelka, K. P. Muller, Hermann Mader	Simulation of dry etch processes by COMPOSITE.	IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.	1988	DBLP DOI BibTeX RDF
22	Kazuki Shishikura, Hiroyuki Nabae, Akihiro Matsutani, Mina Sato, Koichi Suzumori	Tetherless IPMC Actuator Integrated with Thin Magnesium Battery Formed by Sputtering.	SII	2024	DBLP DOI BibTeX RDF
22	Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann	Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales.	CoRR	2023	DBLP DOI BibTeX RDF
22	Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi	Kr-Plasma Sputtering for Pt Gate Electrode Deposition on MFSFET with 5 nm-Thick Ferroelectric Nondoped HfO2 Gate Insulator for Analog Memory Application.	IEICE Trans. Electron.	2023	DBLP DOI BibTeX RDF
22	Rodica Plugaru, Iuliana Mihalache, Cosmin Romanitan, Florin Comanescu, Silviu Vulpe, Gabriel Craciun, Neculai Plugaru, Nikolay Djourelov	Light-Sensing Properties of Amorphous Vanadium Oxide Films Prepared by RF Sputtering.	Sensors	2023	DBLP DOI BibTeX RDF
22	Aitor Bikarregi, Santiago Dominguez, Marta Brizuela, Alejandra López, Ana Suarez-Vega, Cecilia Agustín-Sáenz, Micael Presa, Gabriel A. López	Direct Fabrication of a Copper RTD over a Ceramic-Coated Stainless-Steel Tube by Combination of Magnetron Sputtering and Sol-Gel Techniques.	Sensors	2023	DBLP DOI BibTeX RDF
22	Iulian Iordache, Arcadie Sobetkii, Elena Chitanu, Gabriela Beatrice Sbarcea, Virgil Marinescu, Cristina Antonela Banciu, Delia Patroi	Influence of Deposition Time on the Opto-Electronic Properties of 400 °C Annealed ITO Thin Films Deposited by DC Magnetron Sputtering.	ICTON	2023	DBLP DOI BibTeX RDF
22	Hichem Ferhati, K. Kacha, Adel Bendjerad, Fayçal Djeffal, Abdelhamid Benhaya	Optical and Electrical Properties of Annealed AZO/Ag/AZO Multilayer Deposited Using RF Sputtering Technique.	CCE	2023	DBLP DOI BibTeX RDF
22	D. A. Andrés-Chavarría, N. E. Vázquez-Barragán, Sandra Andrea Mayén-Hernández, Jose Santos-Cruz, C. E. Pérez-García, Francisco Javier De Moure-Flores	Effect of the CdTe absorber layer's thickness synthesized by the RF sputtering on the performance of CdTe photovoltaic windows.	CCE	2023	DBLP DOI BibTeX RDF
22	Shun'ichiro Ohmi, Masakazu Tanuma, Joong-Won Shin	Precise VTH Control of MFSFET with 5 nm-thick FeND-HfO2 Realized by Kr-Plasma Sputtering for Pt Gate Electrode Deposition.	DRC	2023	DBLP DOI BibTeX RDF
22	Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp	Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance.	PLANS	2023	DBLP DOI BibTeX RDF
22	Sara Kim, Nam-Hoon Kim	Electronic Structure and Thermoelectric Properties of Mg2Sn Films Fabricated by Using Co-Sputtering Process With Stoichiometric Modification.	IEEE Access	2022	DBLP DOI BibTeX RDF
22	Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann	Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges.	CoRR	2022	DBLP DOI BibTeX RDF
22	Eun-Ki Hong, Kyung Eun Park, Shun'ichiro Ohmi	Sputtering Gas Pressure Dependence on the LaBxNy Insulator Formation for Pentacene-Based Back-Gate Type Floating-Gate Memory with an Amorphous Rubrene Passivation Layer.	IEICE Trans. Electron.	2022	DBLP DOI BibTeX RDF
22	Joong-Won Shin, Masakazu Tanuma, Shun'ichiro Ohmi	MFSFET with 5nm Thick Ferroelectric Nondoped HfO2 Gate Insulator Utilizing Low Power Sputtering for Pt Gate Electrode Deposition.	IEICE Trans. Electron.	2022	DBLP DOI BibTeX RDF
22	Cátia Magro, Oriana C. Gonçalves, Marcelo Morais, Paulo A. Ribeiro 0001, Susana Sério, Pedro Vieira 0002, Maria Raposo	Volatile Organic Compound Monitoring during Extreme Wildfires: Assessing the Potential of Sensors Based on LbL and Sputtering Films.	Sensors	2022	DBLP DOI BibTeX RDF
22	Jonathan Ortiz Vázquez, Ramon Peña-Sierra, Lucia Juarez-Amador, Miguel Galvan Arellano	Amorphous-Ga2O3/GaAs(100) anisotype heterojunctions with amorphous-Ga2O3 n-type films grown by magnetron sputtering.	CCE	2022	DBLP DOI BibTeX RDF
22	Christian Woelfel, Moritz Oberberg, Birk Berger, Dennis Engel, Ralf Peter Brinkmann, Julian Schulze, Peter Awakowicz, Jan Lunze	Control-oriented plasma modeling and controller design for reactive sputtering.	IFAC J. Syst. Control.	2021	DBLP DOI BibTeX RDF
22	Fabi Zhang, Jinyu Sun, Haiou Li, Juan Zhou, Rong Wang, Tangyou Sun, Tao Fu, Gongli Xiao, Qi Li, Xingpeng Liu, Xiuyun Zhang, Daoyou Guo, Xianghu Wang, Zujun Qin	Band-gap tunable (GaxIn1-x)2O3 layer grown by magnetron sputtering.	Frontiers Inf. Technol. Electron. Eng.	2021	DBLP DOI BibTeX RDF
22	Salah Eddine Chouaib Refas, Abdelkader Bouazza, Youcef Belhadji	3D sputtering simulations of the CZTS, Si and CIGS thin films using Monte-Carlo method.	Monte Carlo Methods Appl.	2021	DBLP DOI BibTeX RDF
22	Z. Zaaboub, F. Hassen, L. Chaabane, H. Maaref	Photoluminescence and time resolved photoluminescence properties in as grown ZnO thin films prepared by DC reactive sputtering for optoelectronic devices.	Microelectron. J.	2021	DBLP DOI BibTeX RDF
22	Tobias Gergs, Borislav Borislavov, Jan Trieschmann	An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks.	CoRR	2021	DBLP DOI BibTeX RDF
22	Shokirbek Shermukhamedov, Michael Probst, Lei Chen	Neural Network Based Molecular Dynamics Simulations of Sputtering Processes.	e-Science	2021	DBLP DOI BibTeX RDF
22	Javier Sotelo Medina, Daniel Ortiz Gutiérrez, Vyacheslav Elyukhin, Ramon Peña-Sierra	Synthesis and Characterization of Ge Nanoclusters in Amorphous GeOx(x∼0.1) Nano-Films Grown by Magnetron Sputtering.	CCE	2021	DBLP DOI BibTeX RDF
22	András Kelemen, Róbert Rossi Madarász	Reactive magnetron sputtering: an offline parameter identification method.	SACI	2021	DBLP DOI BibTeX RDF
22	Wonjoo Kim, Dirk J. Wouters, Rainer Waser, Vikas Rana	Tuning the Memory Window of TaOx ReRAM Using the RF Sputtering Power.	ISCAS	2021	DBLP DOI BibTeX RDF
22	Shun'ichiro Ohmi, Shin Ishimatsu, Yuske Horiuchi, Sohya Kudoh	In-Situ N2-Plasma Nitridation for High-k HfN Gate Insulator Formed by Electron Cyclotron Resonance Plasma Sputtering.	IEICE Trans. Electron.	2020	DBLP DOI BibTeX RDF
22	Florian Bartoli, Jérémy Streque, Jaafar Ghanbaja, Philippe Pigeat, Pascal Boulet, Sami Hage-Ali, Natalya Naumenko, A. Redjaïmia, Thierry Aubert, Omar Elmazria	Epitaxial Growth of Sc0.09Al0.91N and Sc0.18Al0.82N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications.	Sensors	2020	DBLP DOI BibTeX RDF
22	Koji Yuhashi, Michiko Nishiyama, Junichi Ida, Shoichi Kubodera, Kazuhiro Watanabe	Temperature characteristics of hetero-core optical fiber Au/TiO2 SPR sensors fabricated by sputtering and Layer-by-Layer stacking techniques.	IEEE SENSORS	2020	DBLP DOI BibTeX RDF
22	Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki	Commercial Production of Low-k PZT film using Sputtering Method.	IEEE SENSORS	2020	DBLP DOI BibTeX RDF
22	Kyung Eun Park, Shun'ichiro Ohmi	High-k LaBxNy gate insulator formed by the Ar/N2 plasma sputtering of N-doped LaB6 metal thin films and its application to floating-gate memory.	DRC	2020	DBLP DOI BibTeX RDF
22	Shun'ichiro Ohmi, Min Gee Kim, Masakazu Kataoka, Masaki Hayashi, Rengie Mark D. Mailig	Low-Voltage Operation of MFSFET with Ferroelectric Nondoped HfO2 Formed by Kr/O2-Plasma Sputtering.	DRC	2020	DBLP DOI BibTeX RDF
22	Boxue Du, Zehua Wang, Jin Li 0019, Mi Xiao, Hucheng Liang	Surface FGM Insulator Based on BaTiO3 Magnetron Sputtering for Electric Field Grading of AC Gas Insulated Power Apparatus.	IEEE Access	2019	DBLP DOI BibTeX RDF
22	Binjian Zeng, Jiajia Liao, Qiangxiang Peng, Min Liao, Yichun Zhou, Shun'ichiro Ohmi	The Effect of Kr/O2 Sputtering on the Ferroelectric Properties of SrBi2Ta2O9 Thin Film Formation.	IEICE Trans. Electron.	2019	DBLP DOI BibTeX RDF
22	Qiuwei Xing, Haijiang Wang, Mingbiao Chen, Zhaoyun Chen, Rongbin Li, Peipeng Jin, Yong Zhang 0003	Mechanical Properties and Corrosion Resistance of NbTiAlSiZrNx High-Entropy Films Prepared by RF Magnetron Sputtering.	Entropy	2019	DBLP DOI BibTeX RDF
22	Wei-Bing Liao, Hongti Zhang, Zhi-Yuan Liu, Pei-Feng Li, Jian-Jun Huang, Chun-Yan Yu, Yang Lu 0002	High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering.	Entropy	2019	DBLP DOI BibTeX RDF
22	Zulema Rebollar Rivera, Arturo Maldonado-Alvarez, María de la Luz Olvera-Amador	Effect of Thickness on Photocatalytic Properties of ZnO thin films Deposited by RF Magnetron Sputtering.	CCE	2019	DBLP DOI BibTeX RDF
22	David Santos Cuz, María de la Luz Olvera-Amador, Francisco Javier De Moure-Flores, Jose Santos-Cruz	Comparative Analisis of CdS Thin Flims deposited by CBD and RF-Sputtering.	CCE	2019	DBLP DOI BibTeX RDF
22	Andrea Fasoli, L. Thornquist, K. Lionti, Linda K. Sundberg, L. Bozano	Sputtering of Metal Oxide Semiconductor n-p Stacks.	ISOEN	2019	DBLP DOI BibTeX RDF
22	Lionel Presmanes, Vignesh Gunasekaran, Yohann Thimont, Inthuga Sinnarasa, Antoine Barnabé, Philippe Ménini, Philippe Tailhades	Ga doped ZnO thin films deposited by RF sputtering for NO2 sensing.	exp.at	2019	DBLP DOI BibTeX RDF
22	Mitchell Hsing	Design, fabrication, and characterization of a compact magnetron sputtering system for micro/nano fabrication.		2019	RDF
22	Kai Bo, Xue Zhou, Guofu Zhai, Mo Chen	Simulation of Metal Droplet Sputtering and Molten Pool on Copper Contact under Electric Arc.	IEICE Trans. Electron.	2018	DBLP DOI BibTeX RDF
22	Xinghao Liang, Yang Li, Qiang Zhao 0004, Zheng Zhang, Xiaoping Ouyang 0001	Effect of Carbon Concentration on the Sputtering of Carbon-Rich SiC Bombarded by Helium Ions.	Comput.	2018	DBLP DOI BibTeX RDF
22	Florian Krüger, Tobias Gergs, Jan Trieschmann	Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations.	CoRR	2018	DBLP DOI BibTeX RDF
22	Hee Pyung Park, Sang Woo Kim, Joong-Won Shin, Won-Ju Cho, Jong Tae Park 0003	Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors.	Microelectron. Reliab.	2018	DBLP DOI BibTeX RDF
22	Yong Zhang 0003, Xue-Hui Yan, Wei-Bing Liao, Kun Zhao	Effects of Nitrogen Content on the Structure and Mechanical Properties of (Al0.5CrFeNiTi0.25)Nx High-Entropy Films by Reactive Sputtering.	Entropy	2018	DBLP DOI BibTeX RDF
22	Changbao Wen, Taotao Niu, Yue Ma, Nan Gao, Feng Ru	Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering.	Sensors	2018	DBLP DOI BibTeX RDF
22	Shea-Jue Wang, Mu-Chun Wang, Shih-Fan Chen, Yu-Hsiang Li, Tien-Szu Shen, Hui-Yun Bor, Chao-Nan Wei	Electrical and Physical Characteristics of WO3/Ag/WO3 Sandwich Structure Fabricated with Magnetic-Control Sputtering Metrology †.	Sensors	2018	DBLP DOI BibTeX RDF
22	Abid Iqbal, Faisal Mohd-Yasin	Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.	Sensors	2018	DBLP DOI BibTeX RDF
22	Akinobu Teramoto, Keiichi Hashimoto, Tomoyuki Suwa, Jun-ichi Tsuchimoto, Marie Hayashi, Hyeonwoo Park, Shigetoshi Sugawa	Reliability of MgO in magnetic tunnel junctions formed by MgO sputtering and Mg oxidation.	IRPS	2018	DBLP DOI BibTeX RDF
22	Takafumi Kubota, Keishiro Hirata, Shinji Takayanagi, Mami Matsukawa	Control of hydroxyapatite film orientation by RF magnetron sputtering.	EMBC	2018	DBLP DOI BibTeX RDF
22	Bian Tian, Zhongkai Zhang, Zhe Du, Qiuyue Yu, Qijing Lin, Na Zhao 0001, Zhuangde Jiang	Influence of Magnetron Sputtering Parameters on Heat Volatilization Property of Tungsten-Rhenium Thin Film Thermocouples.	NEMS	2018	DBLP DOI BibTeX RDF
22	Xingkai Lin, Yanlei Wang, Guifu Ding, Congchun Zhang	Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering.	NEMS	2018	DBLP DOI BibTeX RDF
22	K. R. Khiangte Amlta, A. Laha, S. Mahapatra, U. Gangway	Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI.	DRC	2018	DBLP DOI BibTeX RDF
22	L. C. Silva, B. Barrocas, M. E. Melo Jorge, Susana Sério	Photocatalytic Degradation of Rhodamine 6G using TiO2/WO3 Bilayered Films Produced by Reactive Sputtering.	PHOTOPTICS	2018	DBLP DOI BibTeX RDF
22	Steven Arbeltier	Optimisation de dépôts de LIPON par pulvérisation magnétron RadioFréquence pour la fabrication de micro-batteries. Modélisation de l'interaction plasma-surface. (Optimisation of LIPON deposit by RadioFrequency magnetron sputtering for micro-batteries production. Plasma-surface interaction modeling).		2018	RDF
22	Joaquin Ascorbe, Jesús M. Corres, Francisco J. Arregui, Ignacio R. Matías	Humidity Sensor Based on Bragg Gratings Developed on the End Facet of an Optical Fiber by Sputtering of One Single Material.	Sensors	2017	DBLP DOI BibTeX RDF
22	Li Wang, Xiu-Mei Wan, Ran Gao, Dan-Feng Lu, Zhimei Qi	Nanoporous Gold Films Prepared by a Combination of Sputtering and Dealloying for Trace Detection of Benzo[a]pyrene Based on Surface Plasmon Resonance Spectroscopy.	Sensors	2017	DBLP DOI BibTeX RDF
22	Joaquin Ascorbe, Jesús M. Corres, Francisco J. Arregui, Ignacio Raúl Matías	Refractive index sensing performance of a Bragg grating built up on the tip of an optical fiber by reactive sputtering.	IEEE SENSORS	2017	DBLP DOI BibTeX RDF
22	Alessandro Chiasera, Francesco Scotognella, Dominik Dorosz, Gianluca Galzerano, Anna Lukowiak, Davor Ristic, Giorgio Speranza, Iustyna Vasilchenko, Alessandro Vaccari 0001, Sreeramulu Valligatla, Stefano Varas, Lidia Zur, Mile Ivanda, Alessandro Martucci, Giancarlo Cesare Righini, Stefano Taccheo, Roberta Ramponi, Maurizio Ferrari	Glass based structures fabricated by rf-sputtering.	MIPRO	2017	DBLP DOI BibTeX RDF
22	Abdelkader Bouazza, Abderrahmane Settaouti	Study and simulation of the sputtering process of material layers in plasma.	Monte Carlo Methods Appl.	2016	DBLP DOI BibTeX RDF
22	Kun-Neng Chen, Chao-Ming Hsu, Jing Liu, Yu-Chen Liou, Cheng-Fu Yang	Investigation of Antireflection Nb2O5 Thin Films by the Sputtering Method under Different Deposition Parameters.	Micromachines	2016	DBLP DOI BibTeX RDF
22	Wenjie Sheng, Xiao Yang, Cong Wang, Yong Zhang 0003	Nano-Crystallization of High-Entropy Amorphous NbTiAlSiWxNy Films Prepared by Magnetron Sputtering.	Entropy	2016	DBLP DOI BibTeX RDF
22	Nithi Atthi, Shun'ichiro Ohmi	Investigation of bilayer HfNx gate insulator utilizing ECR plasma sputtering.	IEICE Electron. Express	2016	DBLP DOI BibTeX RDF
22	Alessandro Chiasera, Iustyna Vasilchenko, Dominik Dorosz, M. Cotti, Stefano Varas, E. Iacob, Giorgio Speranza, Alessandro Vaccari 0001, Sreeramulu Valligatla, Lidia Zur, Anna Lukowiak, Giancarlo Cesare Righini, M. Ferrari	RF-sputtering derived phosphosilicate planar waveguides activated by Er3+ ions.	ICTON	2016	DBLP DOI BibTeX RDF
22	Saraí Vázquez, Antonio Olivares, Ismael Cosme, Svetlana Mansurova, Andrey Kosarev, Adrian Itzmoyotl	Study of optoelectronics properties of indium tin oxide films fabricated by sputtering in oxygen atmosphere.	CCE	2016	DBLP DOI BibTeX RDF
22	Anjie Ming, Weibing Liu, Lingling Li, Xilong Sun, Xuan Zheng, Weibing Wang, Qiulin Tan, Jijun Xiong, Dapeng Chen	Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering.	NEMS	2016	DBLP DOI BibTeX RDF
22	Xiaorong Chen, Jie Feng, Haili Ma	The resistive switching characteristics in tantalum oxide-based RRAM device via combining high-temperature sputtering with plasma oxidation.	NVMTS	2015	DBLP DOI BibTeX RDF
22	Dae-Hee Han, Shun'ichiro Ohmi, Tomoyuki Suwa, Philippe Gaubert, Tadahiro Ohmi	Influence of Si Surface Roughness on Electrical Characteristics of MOSFET with HfON Gate Insulator Formed by ECR Plasma Sputtering.	IEICE Trans. Electron.	2014	DBLP DOI BibTeX RDF
22	Yih-Shing Lee, Tung-Wei Yen, Cheng-I Lin, Horng-Chih Lin, Yun Yeh	Electrical characteristics of amorphous In-Ga-Zn-O thin-film transistors prepared by radio frequency magnetron sputtering with varying oxygen flows.	Displays	2014	DBLP DOI BibTeX RDF
22	Jayaraman Vinoth Kumar, Arturo Maldonado, Yasuhiro Matsumoto, María de la Luz Olvera-Amador	Effect of rf power on structural, optical and morphological properties of ultrathin undoped ZnO films deposited by rf magnetron sputtering.	CCE	2014	DBLP DOI BibTeX RDF
22	Young Sik Song, Yunho Han, Tai Hong Yim	Conventional magnetron sputtering of metal seed layers on high aspect ratio vias with tilting.	3DIC	2014	DBLP DOI BibTeX RDF
22	Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata	Influence of target-target distance for composition distribution in new facing targets sputtering.	MHS	2014	DBLP DOI BibTeX RDF
22	Koji Eriguchi, Yoshinori Takao, Kouichi Ono	A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering.	ICICDT	2014	DBLP DOI BibTeX RDF
22	Naoki Honda, Akito Honda	Deposition of Inclined Magnetic Anisotropy Film by Oblique Incidence Collimated Sputtering.	IEICE Trans. Electron.	2013	DBLP DOI BibTeX RDF
22	Lúcia Gomes, Ana Marques, Aida Branco, Jorge Araújo, Mário Simões, Susana Cardoso, Fernando Silva, Inês Henriques, César A. T. Laia, Cláudia Costa	IZO deposition by RF and DC sputtering on paper and application on flexible electrochromic devices.	Displays	2013	DBLP DOI BibTeX RDF
22	Hei Wong, B. L. Yang, Shurong Dong	Thermal and voltage instabilities of hafnium oxide films prepared by sputtering technique.	Microelectron. Reliab.	2013	DBLP DOI BibTeX RDF
22	Dae-Hee Han, Huiseong Han, Shun'ichiro Ohmi	Impact of Si surface roughness on MOSFET characteristics with ultrathin HfON gate insulator formed by ECR plasma sputtering.	IEICE Electron. Express	2013	DBLP DOI BibTeX RDF
22	Tomoya Syudou, Kazuyoshi Tsuchiya	Creation of the high functional painless micro needle using the sputtering method.	MHS	2013	DBLP DOI BibTeX RDF
22	Mizue Mizoshiri, Masashi Mikami, Kimihiro Ozaki, Mitsuhiro Shikida, Seiichi Hata	Thermoelectric thick film patterns formed by using thermally-assisted sputtering method and silicone lift-off masks.	MHS	2013	DBLP DOI BibTeX RDF
22	Sergey Belikov	Constrained optimization of rotating magnetron in low-pressure plasma sputtering.	ACC	2013	DBLP DOI BibTeX RDF
22	Miao Yu, Tim Giffney, Kean C. Aw, Haixia Zhang 0002	Effect of RF sputtering parameters on PZT crystal growth.	NEMS	2013	DBLP DOI BibTeX RDF
22	Chuhang Zhang, Hironori Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, Tomomi Nagase, Atsushi Nakajima	Development of cluster ion source based on modulated pulse power magnetron sputtering technique.	NEMS	2013	DBLP DOI BibTeX RDF
22	Hung-Chun Lin, Chao-Ton Su, Chi-Ching Wang, Bing-Hung Chang, Rei-Cheng Juang	Parameter optimization of continuous sputtering process based on Taguchi methods, neural networks, desirability function, and genetic algorithms.	Expert Syst. Appl.	2012	DBLP DOI BibTeX RDF
22	Akio Ohta, Yuta Goto, Shingo Nishigaki, Guobin Wei, Hideki Murakami, Seiichiro Higashi, Seiichi Miyazaki	Characterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering.	IEICE Trans. Electron.	2012	DBLP DOI BibTeX RDF
22	Li Yan, Ping-Yang Wang, Yang-Hua Ou, Xiao-Lu Kang	Numerical Study of Hall Thruster Plume and Sputtering Erosion.	J. Appl. Math.	2012	DBLP DOI BibTeX RDF
22	Dedong Han, Yi Wang, Shengdong Zhang, Lei Sun, Ruqi Han, Satoru Matsumoto, Yuji Ino	Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display.	Sci. China Inf. Sci.	2012	DBLP DOI BibTeX RDF
22	Antonio A. Gentile	Review of strategies for a comprehensive simulation in sputtering devices	CoRR	2012	DBLP BibTeX RDF
22	Huiseong Han, Shun'ichiro Ohmi	Hafnium-nitride gate insulator formed by electron-cyclotron-resonance plasma sputtering.	IEICE Electron. Express	2012	DBLP DOI BibTeX RDF
22	J. Alarcon-Salazar, Mariano Aceves-Mijares, S. Roman-Lopez, Ciro Falcony	Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering.	CCE	2012	DBLP DOI BibTeX RDF
22	P. Ratanapreechachai, Isaku Kanno, M. Sato	Sputtering Deposition of Lead-free Piezoelectric (K, Na)NbO3 Thin Films.	ICETET	2012	DBLP DOI BibTeX RDF
22	Seiji Nakashima, Yusuke Takada, Taiki Ito, Syota Seto, Hironori Fujisawa, Masafumi Kobune, Masaru Shimizu	Preparation and Characterization of High Quality Lead-free BiFeO3 Thin Films by Sputtering Process.	ICETET	2012	DBLP DOI BibTeX RDF