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Searching for Photolithography with no syntactic query expansion in all metadata.

Publication years (Num. hits)
1970 (16) 1985-2003 (16) 2004-2006 (19) 2007-2008 (19) 2009-2012 (19) 2014-2018 (20) 2019-2022 (15) 2023-2024 (6)
Publication types (Num. hits)
article(54) incollection(1) inproceedings(73) phdthesis(2)
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Found 130 publication records. Showing 130 according to the selection in the facets
Hits ? Authors Title Venue Year Link Author keywords
94Peter J. Byrne, Cathal Heavey, Kamil Erkan Kabak An analysis of tool capabilities in the photolithography area of an ASIC fab. Search on Bibsonomy WSC The full citation details ... 2007 DBLP  DOI  BibTeX  RDF
88Arthur M. D. Shr, Alan Liu, Peter P. Chen A Heuristic Load Balancing Scheduling Method for Dedicated Machine Constraint. Search on Bibsonomy IEA/AIE The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
65Peter J. Byrne An analysis of semiconductor reticle management using discrete event simulation. Search on Bibsonomy SCSC The full citation details ... 2007 DBLP  BibTeX  RDF photolithography, reticle management, decision support systems, discrete event simulation
59Lars Mönch, Matthias Prause, Volker Schmalfuss Simulation-based solution of load-balancing problems in the photolithography area of a semiconductor wafer fabrication facility. Search on Bibsonomy WSC The full citation details ... 2001 DBLP  DOI  BibTeX  RDF
47Huy Nguyen Anh Pham, Arthur M. D. Shr, Peter P. Chen An Integer Linear Programming Approach for Dedicated Machine Constraint. Search on Bibsonomy ACIS-ICIS The full citation details ... 2008 DBLP  DOI  BibTeX  RDF Dedicated Machine Constraint, Photolithography, Integer Linear Programming, Semiconductor Manufacturing
41Kamil Erkan Kabak, Cathal Heavey, Vincent Corbett Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model. Search on Bibsonomy WSC The full citation details ... 2008 DBLP  DOI  BibTeX  RDF
35Jessica E. Rajkowski, Aaron P. Gerratt, Ethan W. Schaler, Sarah Bergbreiter A multi-material milli-robot prototyping process. Search on Bibsonomy IROS The full citation details ... 2009 DBLP  DOI  BibTeX  RDF
35Sandip Kundu The Guiding Light for Chip Testing. Search on Bibsonomy DDECS The full citation details ... 2008 DBLP  DOI  BibTeX  RDF
35Yoko Yamanishi, Shinya Sakuma, Yuki Kihara, Fumihito Arai On-chip magnetic 3D soft microactuators made by gray-scale lithography. Search on Bibsonomy IROS The full citation details ... 2008 DBLP  DOI  BibTeX  RDF
35Huy Nguyen Anh Pham, Arthur M. D. Shr, Peter P. Chen, Alan Liu Scheduling for Dedicated Machine Constraint Using Integer Programming. Search on Bibsonomy ICTAI (1) The full citation details ... 2008 DBLP  DOI  BibTeX  RDF
35Yi-Chung Lo, Yuan-Hsun Wu, Chia-Sheng Huang, Hong-Wen Liu, Chi-Hung Lin, Jengping Lin, Wensyang Hsu, Chaoen Wang Sub-Microfabrication of Protein Micropatterns for Cell Biology Applications. Search on Bibsonomy ICMENS The full citation details ... 2004 DBLP  DOI  BibTeX  RDF
35Anne M. Murray, David J. Miller 0004 Automated material handling systems: automated reticle handling: a comparison of distributed and centralized reticle storage and transport. Search on Bibsonomy WSC The full citation details ... 2003 DBLP  DOI  BibTeX  RDF
29Vipul Singhal, C. B. Keshav, K. G. Surnanth, P. R. Suresh Transistor Flaring in Deep Submicron-Design Considerations. Search on Bibsonomy ASP-DAC/VLSI Design The full citation details ... 2002 DBLP  DOI  BibTeX  RDF Deep Submicron (DSM), pullback, photolithography, Subwavelength-lithography, Optical Proximity Correction (OPC), SPICE-models, standard-ce1l library, Design for Manufacturability (DFM)
29H. Keith Nishihara, P. A. Crossley Measuring Photolithographic Overlay Accuracy and Critical Dimensions by Correlating Binarized Laplacian of Gaussian Convolutions. Search on Bibsonomy IEEE Trans. Pattern Anal. Mach. Intell. The full citation details ... 1988 DBLP  DOI  BibTeX  RDF positioning accuracy measurement, convolution correlation, picture element clusters, resist alignment, photolithographic overlay accuracy, critical dimensions, binarized Laplacian of Gaussian convolutions, IC manufacture, interference fringes, edge topology differences, low-contrast images, bar grating, integrated circuit technology, photolithography, pattern recognition, computer vision, computer vision, computerised pattern recognition, feature matching, Laplace transforms, noise tolerance
23Youbao Zhang, Huijie Huang Photolithography Control System : A Case Study For Cyber-Physical System. Search on Bibsonomy CoRR The full citation details ... 2024 DBLP  DOI  BibTeX  RDF
23Aris Magklaras 0001, Panayiotis Alefragis, Christos Gogos, Christos Valouxis, Alexios N. Birbas A Genetic Algorithm-Enhanced Sensor Marks Selection Algorithm for Wavefront Aberration Modeling in Extreme-UV (EUV) Photolithography. Search on Bibsonomy Inf. The full citation details ... 2023 DBLP  DOI  BibTeX  RDF
23Cheng Zheng, Guangyuan Zhao, Peter T. C. So Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator. Search on Bibsonomy CoRR The full citation details ... 2023 DBLP  DOI  BibTeX  RDF
23Xiaojiang Liu, Gaoqiang Niu, Jin Li, Yi Zhuang, Xitong Sun, Fei Wang MEMS Gas Sensors with Metal-Oxide Semiconductor Materials Patterned at Wafer-Level by Photolithography Technique. Search on Bibsonomy SENSORS The full citation details ... 2023 DBLP  DOI  BibTeX  RDF
23Tao Zhang 0044, Kamil Erkan Kabak, Cathal Heavey, Oliver Rose A Reinforcement Learning Approach for Improved Photolithography Schedules. Search on Bibsonomy WSC The full citation details ... 2023 DBLP  DOI  BibTeX  RDF
23Yanli Li, Xianhe Liu, Qi Wang, Qiang Wu A Further Analysis of the Forbidden Pitch in Photolithography in Advanced Technology Nodes. Search on Bibsonomy ASICON The full citation details ... 2023 DBLP  DOI  BibTeX  RDF
23Tianwei Wu, Xueqiu You, Zhong Chen 0005 Hollow Microneedles on a Paper Fabricated by Standard Photolithography for the Screening Test of Prediabetes. Search on Bibsonomy Sensors The full citation details ... 2022 DBLP  DOI  BibTeX  RDF
23Patrick C. Deenen, Rick A. M. Adriaensen, John W. Fowler Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. Search on Bibsonomy WSC The full citation details ... 2022 DBLP  DOI  BibTeX  RDF
23Aris Magklaras 0001, Christos Gogos, Panagiotis Alefragis, Christos Valouxis, Alexios N. Birbas Sampling Points Selection Algorithm For Advanced Photolithography Process. Search on Bibsonomy SEEDA-CECNSM The full citation details ... 2022 DBLP  DOI  BibTeX  RDF
23Ibrahem Jasim, Jiayu Liu, Chen Zhu, Muhammad Roman, Jie Huang 0003, Edward C. Kinzel, Mahmoud Almasri Microsphere Photolithography Patterned Nanohole Array on an Optical Fiber. Search on Bibsonomy IEEE Access The full citation details ... 2021 DBLP  DOI  BibTeX  RDF
23Zhian Kuang, Liting Sun, Huijun Gao, Masayoshi Tomizuka Practical Fractional-Order Variable-Gain Super-Twisting Control with Application to Wafer Stages of Photolithography Systems. Search on Bibsonomy CoRR The full citation details ... 2021 DBLP  BibTeX  RDF
23Amir Ghasemi, Cathal Heavey An Evaluation of Strategies for Job Mix Selection in Job Shop Production Environments - Case: A Photolithography Workstation. Search on Bibsonomy WSC The full citation details ... 2021 DBLP  DOI  BibTeX  RDF
23Luhua Xu, Deng Mao, Jinsong Zhang, Yun Wang, Zhenping Xing, Md Samiul Alam, Maxime Jacques, Yannick D'Mello, Santiago Bernal, David V. Plant Broadband Polarization Beam Splitters Based on MMI Couplers with Internal Photonic Crystals Fabricated Using 193 nm Photolithography. Search on Bibsonomy OFC The full citation details ... 2021 DBLP  BibTeX  RDF
23Andrei Ushkov, Olivier Delléa, Isabelle Verrier, Thomas Kampfe, Alexey A. Shcherbakov, Jean-Yves Michalon, Yves Jourlin Nanosphere Photolithography: The Influence of Nanopore Arrays Disorder on Extraordinary Optical Transmission. Search on Bibsonomy PHOTOPTICS The full citation details ... 2021 DBLP  DOI  BibTeX  RDF
23Yingying Dou, Lin Chen, Hui Li 0043, Biao Tang, Alex Henzen, Guofu Zhou Photolithography Fabricated Spacer Arrays Offering Mechanical Strengthening and Oil Motion Control in Electrowetting Displays. Search on Bibsonomy Sensors The full citation details ... 2020 DBLP  DOI  BibTeX  RDF
23James C. Chen, Tzu-Li Chen, Hsiao-Ching Hung Capacity allocation with lot splitting in photolithography area using hybrid genetic algorithm based on self-tuning strategy. Search on Bibsonomy Comput. Ind. Eng. The full citation details ... 2020 DBLP  DOI  BibTeX  RDF
23Shigehiro Hashimoto, Kiyoshi Yoshinaka Is Dielectrophoretic Movement through Micro Channel with Asymmetric Surface Electrodes Fabricated by Photolithography Technique Effective to Sort Flowing Cell? Search on Bibsonomy BIBE The full citation details ... 2020 DBLP  DOI  BibTeX  RDF
23Shigehiro Hashimoto, Kazuyuki Abe Monitoring of Orientation of Cells by Electric Impedance: Test on Oriented Cells Using Micro Striped Grooves Pattern by Photolithography. Search on Bibsonomy BIBE The full citation details ... 2019 DBLP  DOI  BibTeX  RDF
23Hyeong-Ook Kim, Se-Hyeon Park, Jung Yeon Park, James R. Morrison On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools. Search on Bibsonomy WSC The full citation details ... 2019 DBLP  DOI  BibTeX  RDF
23Oluwayemisi Sonoiki Photolithography and surface modification applications of a 172 nanometer xenon microplasma excilamp Search on Bibsonomy 2019   RDF
23Teun Janssen Optimization in the Photolithography Bay: Scheduling and the Traveling Salesman Problem. Search on Bibsonomy 2019   RDF
23Peng Zhang, Youlong Lv, Jie Zhang 0041 An improved imperialist competitive algorithm based photolithography machines scheduling. Search on Bibsonomy Int. J. Prod. Res. The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Peng Zhang 0049, Xinming Zhao, Xia Sheng, Jie Zhang 0041 An Imperialist Competitive Algorithm Incorporating Remaining Cycle Time Prediction for Photolithography Machines Scheduling. Search on Bibsonomy IEEE Access The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Neam Heng Lee, Jian Zhen Tay, Varghese Swamy, Narayanan Ramakrishnan Smartphone Display Based Photolithography to Fabricate Microdevices. Search on Bibsonomy IEEE Access The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Sreenath Chalil Madathil, Siddhartha Nambiar, Scott J. Mason, Mary E. Kurz On scheduling a photolithography area containing cluster tools. Search on Bibsonomy Comput. Ind. Eng. The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Tzu-Yen Hong, Chen-Fu Chien 0001, Hung-Kai Wang, Hong-Zhi Guo A two-phase decoding genetic algorithm for TFT-LCD array photolithography stage scheduling problem with constrained waiting time. Search on Bibsonomy Comput. Ind. Eng. The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Amir Ghasemi, Cathal Heavey, Kamil Erkan Kabak Implementing a New Genetic Algorithm to solve the Capacity Allocation Problem in the photolithography Area. Search on Bibsonomy WSC The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Hsuan An Kuo, Chen Fu Chien 0001 Using Auxiliary Capacity Planning Strategy Genetic Algorithm for TFT-LCD photolithography scheduling to empower Industry 3.5. Search on Bibsonomy CASE The full citation details ... 2018 DBLP  DOI  BibTeX  RDF
23Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity. Search on Bibsonomy IEICE Trans. Electron. The full citation details ... 2017 DBLP  DOI  BibTeX  RDF
23Luca Rondi, Fadil Santosa, Zhu Wang 0003 A Variational Approach to the Inverse Photolithography Problem. Search on Bibsonomy SIAM J. Appl. Math. The full citation details ... 2016 DBLP  DOI  BibTeX  RDF
23Katsuo Nakamura, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Florian Larramendy, Oliver Paul Simulation study of SU-8 structures realized by single-step projection photolithography. Search on Bibsonomy IEEE SENSORS The full citation details ... 2016 DBLP  DOI  BibTeX  RDF
23Patrick Dumais, Yuming Wei, Ming Li, Fei Zhao, Xin Tu, Jia Jiang, Dritan Celo, Dominic J. Goodwill, Hongyan Fu 0001, Dongyu Geng, Eric Bernier 2×2 multimode interference coupler with low loss using 248 nm photolithography. Search on Bibsonomy OFC The full citation details ... 2016 DBLP  BibTeX  RDF
23Masanori Iwata, Kenji Miyake, Nobuyoshi Yamauchi, Junko Kazusa Blue GaN based LED fabrication using hybrid process of the minimal photolithography system and MOCVD. Search on Bibsonomy ICICDT The full citation details ... 2016 DBLP  DOI  BibTeX  RDF
23Terence Sweeney, Kevin Curran The detection of empty resist bottles or air in the resist lines of a photolithography coating tool. Search on Bibsonomy Int. J. Comput. Integr. Manuf. The full citation details ... 2015 DBLP  DOI  BibTeX  RDF
23Bing-Hai Zhou, Xin Li 0030, Richard Y. K. Fung Dynamic scheduling of photolithography process based on Kohonen neural network. Search on Bibsonomy J. Intell. Manuf. The full citation details ... 2015 DBLP  DOI  BibTeX  RDF
23Kyungsu Park, James R. Morrison Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic. Search on Bibsonomy IEEE Trans Autom. Sci. Eng. The full citation details ... 2015 DBLP  DOI  BibTeX  RDF
23Kyosuke Muramatsu, Hideaki Asakura, Keijiro Suzuki, Ken Tanizawa, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino, Kazuhiro Ikeda, Shu Namiki, Hitoshi Kawashima, Hiroyuki Tsuda Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. Search on Bibsonomy IEICE Electron. Express The full citation details ... 2015 DBLP  DOI  BibTeX  RDF
23Wen-Chin Chen, Xiao-Yun Jiang, Hui-Pin Chang, Hisa-Ping Chen An effective system for parameter optimization in photolithography process of a LGP stamper. Search on Bibsonomy Neural Comput. Appl. The full citation details ... 2014 DBLP  DOI  BibTeX  RDF
23Rodrigo Martinez-Duarte SU-8 Photolithography as a Toolbox for Carbon MEMS. Search on Bibsonomy Micromachines The full citation details ... 2014 DBLP  DOI  BibTeX  RDF
23Kyung-Hak Choi, Jinwoo Huh, Yonghao Cui, Krutarth Trivedi, Walter Hu, Byeong-Kwon Ju, Jeong-Bong Lee One-Step Combined-Nanolithography-and-Photolithography for a 2D Photonic Crystal TM Polarizer. Search on Bibsonomy Micromachines The full citation details ... 2014 DBLP  DOI  BibTeX  RDF
23Abdoul Bitar, Stéphane Dauzère-Pérès, Claude Yugma On the importance of optimizing in scheduling: the photolithography workstation. Search on Bibsonomy WSC The full citation details ... 2014 DBLP  DOI  BibTeX  RDF
23Wen-Yi Lin, Wen-Bin Wu, K. C. Cheng, Hsin Hung Li Photolithography for Thin-Film-Transistor Liquid Crystal Displays. Search on Bibsonomy Handbook of Visual Display Technology The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23Li-Yuan Yen, Kuo-Hao Chang Cycle time reduction for photolithography area with multi-workstation. Search on Bibsonomy CSCWD The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23Jhih-Nan Yan, Yung-Chun Lee Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate. Search on Bibsonomy NEMS The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23Yi-Ta Hsieh, Yung-Chun Lee Metal contact printing photolithography for fabricating sub-micrometer patterned sapphire substrates in light-emitting diodes. Search on Bibsonomy NEMS The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23Kuo-Feng Huang, Sung-Wen Tsai, Yung-Chun Lee Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography. Search on Bibsonomy NEMS The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23Lin Li 0008, Xiaowen Liu, Andrew J. Mason Die-level photolithography and etchless parylene packaging processes for on-CMOS electrochemical biosensors. Search on Bibsonomy ISCAS The full citation details ... 2012 DBLP  DOI  BibTeX  RDF
23James R. Morrison On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation. Search on Bibsonomy WSC The full citation details ... 2011 DBLP  DOI  BibTeX  RDF
23Hao Lv, Shiyuan Liu, Peng Zhang, Zirong Tang Fabrication of biomimetic gecko setae by direct photolithography and micromolding processes. Search on Bibsonomy NEMS The full citation details ... 2011 DBLP  DOI  BibTeX  RDF
23Wen-Hui Li, Hong-Wei Chen, Ya-Wen Hu, Yung-Chun Lee, Fei-Bin Hsiao Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. Search on Bibsonomy NEMS The full citation details ... 2011 DBLP  DOI  BibTeX  RDF
23Hyun-Jin Kim, Kwang-Jae Kim, Doh-Soon Kwak A case study on modeling and optimizing photolithography stage of semiconductor fabrication process. Search on Bibsonomy Qual. Reliab. Eng. Int. The full citation details ... 2010 DBLP  DOI  BibTeX  RDF
23Kazuyoshi Itoga, Jun Kobayashi, Masayuki Yamato, Teruo Okano Development of Microfabrication Technology with Maskless Photolithography Device Using LCD Projector. Search on Bibsonomy J. Robotics Mechatronics The full citation details ... 2010 DBLP  DOI  BibTeX  RDF
23Andreas Klemmt, Jan Lange, Gerald Weigert, Frank Lehmann 0001, Jens Seyfert A multistage mathematical programming based scheduling approach for the photolithography area in semiconductor manufacturing. Search on Bibsonomy WSC The full citation details ... 2010 DBLP  DOI  BibTeX  RDF
23Hong-Wei Chen, Yung-Chun Lee, Fei-Bin Hsiao Fabrication of seamless patterns onto metal rollers by photolithography. Search on Bibsonomy NEMS The full citation details ... 2010 DBLP  DOI  BibTeX  RDF
23Lih-Shyang Chen, Young-Jinn Lay, Lian-Yong Lin, Jing-Jou Tang, Wen-Lin Cheng, Yu-Jen Lin The 3D Display and Analysis of the Pattern of Photolithography. Search on Bibsonomy ICCCI (1) The full citation details ... 2010 DBLP  DOI  BibTeX  RDF
23Arthur M. D. Shr, Alan Liu, Peter P. Chen Load Balancing Among Photolithography Machines in the Semiconductor Manufacturing System. Search on Bibsonomy J. Inf. Sci. Eng. The full citation details ... 2008 DBLP  BibTeX  RDF
23Shu-Hsing Chung, Chun-Ying Huang, Amy H. I. Lee Heuristic algorithms to solve the capacity allocation problem in photolithography area (CAPPA). Search on Bibsonomy OR Spectr. The full citation details ... 2008 DBLP  DOI  BibTeX  RDF
23James R. Morrison, Donald P. Martin Performance evaluation of photolithography cluster tools. Search on Bibsonomy OR Spectr. The full citation details ... 2007 DBLP  DOI  BibTeX  RDF
23Fumihito Arai, Takuma Nakano, Mika Tada, Yu-Ching Lin, Seiichi Ikeda, Tomoyuki Uchida, Hiroyuki Oura, Toshio Fukuda, Takehisa Matsuda, Makoto Negoro Fabrication of Cell-Adhesion Surface and Arteriole Model by Photolithography. Search on Bibsonomy J. Robotics Mechatronics The full citation details ... 2007 DBLP  DOI  BibTeX  RDF
23James R. Morrison, Maruthi Kumar Mutnuri On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss. Search on Bibsonomy CASE The full citation details ... 2007 DBLP  DOI  BibTeX  RDF
23Benoît Torbiéro, Marie-Laure Pourciel-Gouzy, Iryna Humenyuk, Jean-Baptiste Doucet, Augustin Martinez, Pierre Temple-Boyer Mass patterning of polysiloxane layers using spin coating and photolithography techniques. Search on Bibsonomy Microelectron. J. The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23Yung-Kuang Yang, Tsun-Ching Chang Experimental analysis and optimization of a photo resist coating process for photolithography in wafer fabrication. Search on Bibsonomy Microelectron. J. The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23H.-Y. Kang, Amy H. I. Lee Critical dimension control in photolithography based on the yield by a simulation program. Search on Bibsonomy Microelectron. Reliab. The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23D. Y. Sha, S. Y. Hsu, Z. H. Che 0001, C. H. Chen A dispatching rule for photolithography scheduling with an on-line rework strategy. Search on Bibsonomy Comput. Ind. Eng. The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23F. Mert Sasoglu, Andrew J. Bohl, Bradley E. Layton Microfabrication procedure of PDMS microbeam array using photolithography for laminin printing and piconewton force transduction on axons. Search on Bibsonomy EMBC The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23Arthur M. D. Shr, Alan Liu, Peter P. Chen A Load Balancing Method for Dedicated Photolithography Machine Constraint. Search on Bibsonomy BASYS The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23Shu-Hsing Chung, Chun-Ying Huang, Amy Hsin-I Lee Using Constraint Satisfaction Approach to Solve the Capacity Allocation Problem for Photolithography Area. Search on Bibsonomy ICCSA (3) The full citation details ... 2006 DBLP  DOI  BibTeX  RDF
23Yang-Kuao Kuo, Chuen-Guang Chao, Chi-Yuan Lin Analysis of instability line width and white wall created by the photolithography process. Search on Bibsonomy Microelectron. J. The full citation details ... 2004 DBLP  DOI  BibTeX  RDF
23Wei Kang, Ziqiang John Mao Adaptive modeling and H∞ control for photolithography manufacturing process. Search on Bibsonomy ACC The full citation details ... 2004 DBLP  DOI  BibTeX  RDF
23Wei Kang, Ziqiang John Mao An adaptive model for the control of critical dimension in photolithography process. Search on Bibsonomy CDC The full citation details ... 2004 DBLP  DOI  BibTeX  RDF
23Amr Arisha, Paul Young Intelligent Simulation-Based Lot Scheduling of Photolithography Toolsets in a Wafer Fabrication Facility. Search on Bibsonomy WSC The full citation details ... 2004 DBLP  BibTeX  RDF
23Nirupama Nayani, Mansooreh Mollaghasemi Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing. Search on Bibsonomy WSC The full citation details ... 1998 DBLP  DOI  BibTeX  RDF
23Christopher P. Ausschnitt, Allan C. Thomas, Timothy J. Wiltshire Advanced DUV photolithography in a pilot lineenvironment. Search on Bibsonomy IBM J. Res. Dev. The full citation details ... 1997 DBLP  DOI  BibTeX  RDF
23Thomas C. McGuigan Modeling the Lot Selection Process in Semiconductor Photolithography Processing. Search on Bibsonomy WSC The full citation details ... 1992 DBLP  DOI  BibTeX  RDF
23Teruo Matsuzawa, Akemi Moniwa, N. Hasegawa, Hideo Sunami Two-Dimensional Simulation of Photolithography on Reflective Stepped Substrate. Search on Bibsonomy IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. The full citation details ... 1987 DBLP  DOI  BibTeX  RDF
23Anne M. Spence, Douglas J. Welter Capacity planning of a photolithography work cell in a wafer manufacturing line. Search on Bibsonomy ICRA The full citation details ... 1987 DBLP  DOI  BibTeX  RDF
23Terry Cline, Wendy Fong, Steven Rosenberg An Expert Advisor for Photolithography. Search on Bibsonomy IJCAI The full citation details ... 1985 DBLP  BibTeX  RDF
23Arthur G. Gross, J. Raamot, S. B. Watkins Device photolithography: Computer systems for pattern generator control. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23Patrick G. Dowd, Morton J. Cowan, Peter E. Rosenfeld, A. Zacharias Device photolithography: The primary pattern generator part iii-the control system. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23D. S. Alles, J. W. Elek, F. L. Howland, B. Nevis, R. J. Nielsen, W. A. Schlegel, J. G. Skinner, C. E. Stout Device photolithography: The step-and-repeat camera. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23K. M. Poole Device photolithography: The primary pattern generator introduction. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23Judith G. Brinsfield, Stephen Pardee Device photolithography: The mask shop information system. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23F. R. Ashley, E. B. Murphy, H. J. Savard Device photolithography: A computer controlled coordinate measuring machine. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23Barret Broyde Device photolithography: Electron-sensitive materials. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23F. L. Howland, K. M. Poole Device photolithography: An overview of the new mask-making system. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
23G. J. W. Kossyk, J. P. Laico, L. Rongved, J. W. Stafford Device photolithography: The primary pattern generator part ii-mechanical design. Search on Bibsonomy Bell Syst. Tech. J. The full citation details ... 1970 DBLP  DOI  BibTeX  RDF
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